INFICON SID-142 Thin Film Deposition Controller - Manual (Page 31)

Chapter 3 SQS-142 Software
3-6
3.4 Edit Menu
3.4.1 Edit: Process
A process is a sequence of film layers. Multiple films deposited in the same layer are
known as codeposition. A listing of each film in the selected process appears in the
layers list box. Films in codeposition layers are listed with the same layer number.
Select a layer to edit its parameters in the tabbed dialog boxes.
The Edit Process dialog provides all the functions needed to develop a thin film
deposition process from the database of existing films and materials. The Layer and
Rate Ramp tabs specify the sequence of films to be deposited. The Deposition,
Condition, and Source/Sensor tabs provide control over the individual films assigned to
each layer.
Note: Edits to the Deposition, Condition, and Source/Sensor tabs will affect all
processes and layers that use the selected film!
Process: A drop down box that selects the process to be edited. Defaults to the current
process.
Rename: Edits the name of the selected process.
New: Creates a new process. Since every process must have at least one film, the first
film of the currently selected process is used.
Delete: Deletes the currently selected process from the database. There is no
undelete!
Copy: Creates a duplicate of the currently selected process.