INFICON SID-142 Thin Film Deposition Controller - Manual (Page 53)

Chapter 3 SQS-142 Software
3-28
3.6 Software Specifications
Display
Graphs .............................................................................Rate, Deviation, Power
Readouts..........................................................................Rate,Dev,Thick,Power
Process Parameters
Name ...............................................................................12 characters
# Processes .....................................................................Unlimited
# Layers...........................................................................Unlimited
# Sensors (Dual) ...............................................................1 to 8 (4 Dual)
# Sources.........................................................................1 to 4
Layer Parameters
Start Mode .......................................................................Auto/Manual
Rate.................................................................................0.0 to 999.9 Å/sec.
Thickness.........................................................................0.0 to 999.9 Å
Thickness Limit .................................................................0.0 to 999.9 Å
Time Setpoint ...................................................................0 to 30000 sec.
# Rate Ramps ..................................................................Unlimited
Rate Ramp Start...............................................................0.0 to 999.9 Å
Rate Ramp Time...............................................................0 to 1000 sec.
New Rate .........................................................................0.0 to 999.9 Å/sec.
Substrate Index.................................................................0 to 15
Film Parameters
Name ...............................................................................12 characters
Ramp Time (1,2)...............................................................0 to 30000 sec.
Soak Power (1,2)..............................................................0.0 to 100.0 %
Soak Time (1,2) ................................................................0 to 30000 sec.
Shutter Delay Time ...........................................................0 to 200 sec.
Shutter Delay Error ...........................................................0.0 to 30.0 %
P Term.............................................................................1 to 9999
I Term ..............................................................................0 to 99.9 sec.
D Term.............................................................................0 to 99.9 sec.
Control Error.....................................................................Ignore/Stop/Hold
Control Error Set...............................................................0 to 30.0 %
Feed Ramp Time ..............................................................0 to 30000 sec.
Feed Power......................................................................0.0 to 100.0 %
Feed Time ........................................................................0 to 30000 sec.
Idle Ramp Time ................................................................0 to 30000 sec.
Idle Power........................................................................0.0 to 100.0 %
Tooling (Sensor 1 to 8)......................................................10.0 to 999.0
Max Power .......................................................................0.0 to 100.0 %
Slew Rate ........................................................................0.0 to 100.0 %/sec.
Source Index (Pocket).......................................................0 to 15