INFICON SID-142 Thin Film Deposition Controller - Manual (Page 42)

Chapter 3 SQS-142 Software
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3.4.4 Edit: System
Sets the operation of system Sensors, Sources, Digital I/O, and SQM-142 measurement
card(s).
Sensors Tab
Sensor Name: A meaningful name assigned to sensors 1 to 4 in single card systems; 1
to 8 in two card systems. For easy display, keep the name to less than 8 characters.
Sensor Output: The source output that a sensor is positioned to measure. Typically
each sensor measures deposition from a particular source. If multiple sensors are
assigned to a single output, the sensor readings are averaged when calculating rate
and thickness. Setting a sensor’s Tooling to 0% in Film setup can override this
assignment - see the Sensor Tooling section.
Sensor Dual: Indicates that a pair of sensors is setup as primary/secondary duals.
When the primary sensor fails, the SQS-142 switches to the secondary sensor.
Max/Min/Initial Frequency: The frequency values for the quartz crystal sensors used
as inputs to the SQM-142. Sensor readings outside the min/max values cause an error.
Completion Timer: If Complete Signal is checked, the process will halt if a move
complete signal is not received within this timeout period. If Complete Signal is not
checked, the process waits for this fixed time period before starting a layer.
Complete Signal: Check this box if your substrate index sends a signal designating
that the move is complete and preconditioning can begin.