INFICON SID-142 Thin Film Deposition Controller - Manual (Page 69)

Chapter 6 Computer Interface
6-4
6.3 Command Summary
Note: Update Queries (except UP02-UP10) are only valid in Stop Mode
Query Process: @QP;<param1> (Query)
@QP;O6;Response (ACK Response)
@QP;21;ErrNum (NAK Response)
<param1>
01 Process Name
@QP;01 (Query Process)
@QP;06;MyProc (Process is MyProc)
02 Process Time
@QP;02 (Query Process Time)
@QP;06;32:45 (Time is 32 min., 45 sec.)
03 Layer
@QP;03 (Query Process Layer)
@QP;06;1 (Layer is Layer 1)
04 Layer Time
05 Phase (Phase numbers are shown below)
00 Application Startup 9 ShutterDelay Phase
01 Program Initializing 0 Deposit Phase
02 Not Used 1 Layer Stopped
03 Not Used 2 Layer Starting
04 Process Stopped 3
05 Ramp1 Phase 4 Feed Ramp Phase
06 Soak1 Phase 5 Feed Hold Phase
07 Ramp2 Phase 6 Idle Ramp Phase
08 Soak2 Phase 7 Idle Phase
06 Phase Time
07 Run #
08 All Process Names (returns comma delimited list)
1n Source Shutter, n=1 to 4 (0=Open, 1 =Close)
@QP;12 (Query Source Shutter 2)
@QP;06;0 (Source Shutter 2 is Open)
2n Sensor Shutter, n=1 to 8 (0=Open, 1 =Close)
30 All Crystal Good (0=False, 1=True)
3n Crystal n Good, n=1 to 8 (0=False, 1 =True)
39 All Crystal Fail (0=False, 1=True)
Update Process: @UP;<param1>;<data> (Update)
@UP;O6;Response (ACK Response)
@UP;21;ErrNum (NAK Response)
<param1>
01 Set Process
@UP;01;MyProc (Select MyProc)