INFICON SID-142 Thin Film Deposition Controller - Manual (Page 35)

Chapter 3 SQS-142 Software
3-10
Deposition Tab
The deposition tab contains parameters that directly affect the deposition phase of the
process cycle.
P Term: Sets the gain of the control loop. High gains yield more responsive (but
potentially unstable) loops. Try a value of 50, then gradually increase/decrease the
value to respond to step changes in rate setpoint.
I Term: The integral term controls the time constant of the loop response. A small I
term, say .5 to 1 seconds, will smooth the response of most loops.
D Term: The differential term causes the loop to respond quickly to changes. Use 0 or
a very small value to avoid oscillations.