INFICON SID-142 Thin Film Deposition Controller - Manual (Page 37)

Chapter 3 SQS-142 Software
3-12
Condition Tab
Before deposition begins, it is often necessary to precondition the source material.
This places the system in a state to achieve rapid PID control when deposition begins.
Ramp 1: Ramp power sets the power level desired at the end of the ramp phase, in %
of full scale. Ramp time sets the time to ramp with a linear rate from the initial power to
the Ramp power. Soak time sets the time the output remains at the ramp power level.
Ramp 2: Ramp 2 functions are the same as Ramp 1. Typically, Ramp 2 power is set
near the power level required to achieve the desired initial deposition rate.
Feed: The feed phase holds output power at the level and time required to wire feed
new material.
Idle: The Idle phase ramps the material to a state that is ready for deposition, typically
the same as Ramp 2 power.