INFICON SID-142 Thin Film Deposition Controller User Manual
Page 5
Chapter 3
SQS-142 Software (continued)
3.4.4 System .................................................................................................3-17
Sensors.............................................................................................3-17
Sources.............................................................................................3-18
Digital I/O ..........................................................................................3-19
PLC Setup.........................................................................................3-22
SQM-142 Setup .................................................................................3-23
RS232 Setup .....................................................................................3-24
3.4.5 Security ................................................................................................3-25
3.5 View Menu.................................................................................................3-27
3.6 Specifications.............................................................................................3-28
Chapter 4
SQM-142 PC Card
4.0 Introduction................................................................................................4-1
4.1 Installation .................................................................................................4-2
4.2 Sensor Connection.....................................................................................4-2
4.3 Power Supply Connection...........................................................................4-3
4.4 Demo Programs .........................................................................................4-3
4.5 SQM32C.DLL ............................................................................................4-3
4.6 Specifications..............................................................................................4-5
Chapter 5
Digital I/O
5.0 Introduction................................................................................................5-1
5.1 PLC Installation..........................................................................................5-1
5.2 PLC Setup and Test ...................................................................................5-2
Chapter 6
Computer Interface
6.0 Introduction................................................................................................6-1
6.1 Serial Interface...........................................................................................6-1
6.2 SerialComm Program .................................................................................6-1
6.3 Protocol.....................................................................................................6-2
6.4 Command Summary...................................................................................6-4
Appendix
A. Material Parameters