INFICON TM-400 Thin Film Deposition Monitor - Manual (Page 50)

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TM-350/400 Operating Manual
Start Key
Sets the thickness display to zero, opens the source shutter and sets the active
crystal equal to the primary crystal for the current film.
Stop Key
Closes the source shutter. Also used to clear failures such as P FAIL, O FAIL, etc.
Shutter Key
Toggles the source shutter relay output.
Display Key
Switches the rate and thickness displays between Rate and Thickness, Frequency
and TEST display modes
Film Number Key
Used to display and modify the current film number. When pressed, the current film
number is displayed in the rate display and is changed by pressing the Modify up
and Modify down keys. Each film can be individually programmed by setting the
film number and programming as described in
section 7.3 .
NOTE: Any failures must be cleared in order to advance to the next film.
Sensor Swap Key (TM-400 only)
Toggles the active sensor between sensor 1 and sensor 2. The Sensor shutter will
also toggle so that it is closed when sensor #2 is the active sensor and open when
sensor #1 is the active sensor. Use this key with caution because you can switch
to a failed sensor during a deposit thereby aborting the run and causing and "O
FAIL" message.
7.3 Display and Modification Of Parameters
Display of the parameter values stored in the monitor is accomplished by pressing
the corresponding parameter's key. The value of the parameter is displayed in the
Thickness display and the current film number is displayed in the Rate display. The
parameter is displayed as long as the parameter key or a Modify key is pressed
and is held for about 3 seconds once the keys are released. When displayed, the
value of the parameter can be modified by pressing the Modify up and Modify down
keys. The parameter key needs not be simultaneously pressed with the Modify up
or Modify Down keys. If a Modify up or down keys is kept depressed, the rate at
which the parameter changes gradually increases. Thus the longer the key is kept
depressed the faster the parameter changes. When the key is released and then
depressed again the rate returns to its initial slow value. With a little practice this
allows parameters to be set to the necessary accuracy while keeping the time to
go from one extreme value to another within reasonable limits.