INFICON XTC/C Thin Film Deposition Controller - Manual (Page 183)

Index - 1
IP
N 07
4-
18
3X
XTC/C - XTC/2 Operating Manual
Index
A
active oscillator 5-9 , 5-12
alarms 4-9
anharmonic 5-5 , 5-10
application support 1-11
applications 2-29
AT
crystal 5-12
resonator 5-6
B
backup crystal 2-13
bakeable sensor 3-6
Biological 2-29
biological measurement 2-32
C
calibration 2-14 , 5-1 , 5-3
chart recorder 3-19
co-deposition 3-39
command structure 3-22
compact sensor 3-6
computer communications 3-20
configuration switches 2-19
contamination
declaration of contamination 1-12
control
system 5-14
control loop 4-11 , 5-12
control parameter 2-14
controller
gain 5-14
model 5-12 , 5-14
crucible select 3-17
crystal
frequency spectrum 5-12
resonance point 5-11
crystal fail 2-15 , 4-9 , 4-22
crystal fail inhibit 4-23
crystal indication 2-13
crystal life 2-10 , 4-27
crystal replacement 6-13
crystal snatcher 6-17
CrystalSix 3-10
CrystalSix sensor 3-6
CrystalSwitch 2-10 , 4-24
CrystalSwitch output 4-25
D
DATALOG 3-25
Defining A Process 2-36
density 5-1
calibration 5-1
value 5-1
deposit state 2-15
deposition monitor 2-29
display 1-7
Dual sensor 3-6
E
earth ground 1-3 , 3-2
electrode-to-quartz bond 5-6
electroplating 2-29
error messages 6-1
etching 2-29 , 2-32
evaporation source. 5-12
F
fast source 4-11
field service 1-11
fit, weighted least-square-exponential 5-13
frequency, starting 4-27
fundamental 5-10 , 5-12
G
grounding stud 2-22
grounding, electrical 3-2
H
Hand Held Controller 4-19
I
IAE 5-15
Idle State 2-34
integral time 5-14
ISE 5-14
ITAE 5-15
L
Laplace transform 5-13
LCD Contrast 6-1
liquid measurement 2-33