2 technical data – INFICON PSG55x ATM to Medium Vacuum Gauge User Manual
Page 10
10
tina60e1-a (2011-04)
2 Technical
Data
For further technical data for gauges with serial inter-
faces
→ [3], [4], [5].
Measurement principle
thermal conductance acc. to
Pirani
Measurement range
5×10
-5
… 1000 mbar
Accuracy (N
2
)
5Ч10
-4
… 1Ч10
-3
mbar
±50% of
reading
1×10
-3
… 100 mbar
±15% of
reading
100 … 1000 mbar
±50% of
reading
Resolution (at 1000 mbar)
±0.15% of reading
Repeatability (N
2
)
1×10
-3
… 100 mbar
±2% of
reading
Output signal (measurement signal)
Voltage range
3PIx-0xx-xxx0
0 … +10 V
3PIx-0xx-xxx1
0 … +8.5 V
3PIx-0xx-xxx2
0 … +5.529 V
3PIx-0xx-xxx3
0 … +8.875 V
Measurement range
3PIx-0xx-xxx0
+0.61 … +10 V
3PIx-0xx-xxx1
+1.2 … +8.5 V
3PIx-0xx-xxx2
+0.375 … +5.529 V
3PIx-0xx-xxx3
+1.57 … +8.875 V
Error signal
0 … 0.05 V
Voltage vs. pressure
3PIx-0xx-xxx0
1.286 V/decade, logarithmic
3PIx-0xx-xxx1
1 V/decade, logarithmic
3PIx-0xx-xxx3
1 V/decade, logarithmic
3PIx-0xx-xxx2
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