INFICON PSG55x ATM to Medium Vacuum Gauge - Manual (Page 6)

6 tina60e1-a (2011-04)
Contents
Product Identification 2
Validity 3
Intended Use 5
Trademark 5
Patents 5
Scope of Delivery 5
1 Safety 8
1.1 Symbols Used 8
1.2 Personnel Qualifications 8
1.3 General Safety Instructions 9
1.4 Liability and Warranty 9
2 Technical Data 10
2.1 Output Signal vs. Pressure 18
2.2 Gas Type Dependence 23
3 Installation 24
3.1 Vacuum Connection 24
3.2 Power Connection 27
3.2.1 FCC 68, 8-pin Connector 28
3.2.2 D-Sub, 9-pin Connector 29
3.2.3 D-Sub, 15-pin HD Connector 30
3.2.4 D-Sub, 15-pin HD, RS485 INF Connector 31
3.2.5 DeviceNet Connector 32
3.2.6 Profibus Connector 33
4 Operation 34
4.1 Status Indication and Displays 34
4.2 Gas Type Dependence 38
4.3 Switching Functions SP1, SP2 38
4.4 Diagnostic Port (RS232C Interface) 44
4.5 DeviceNet Operation 45
4.6 Profibus Operation 48
5 Deinstallation 49