1 output signal vs. pressure, P = 10, U = c +1.286log – INFICON PSG55x ATM to Medium Vacuum Gauge User Manual
Page 18: Valid in the range 5×10, Mbar <p< 1000 mbar, Output signal u [v] pressure p
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18
tina60e1-a (2011-04)
2.1
Output Signal vs. Pressure
Measurement range 0.61 … 10 V
Output signal U [V]
Pressure p
O
mbar
Pa
Torr
Err
or
0.0
0.61
3.0
2.5
2.0
1.5
1.0
0.5
4.0
3.5
5.0
4.5
6.0
5.5
7.0
6.5
8.0
7.5
9.0
8.5
10.0
9.5
10.5
1E+05
1E+04
1E+03
1E+02
1E+01
1E+00
1E–01
1E–02
1E–03
1E–04
1E+06
1E–05
p = 10
0.778(U-c)
⇔
U = c +1.286log
10
p
valid in the range
5×10
-5
mbar <p< 1000 mbar
U p
c
U p
c
[V] [mbar]
6.143
[V] [micron]
2.448
[V] [µbar]
2.287
[V] [Pa]
3.572
[V] [Torr]
6.304 [V] [kPa]
7.429
[V] [mTorr]
2.448
where p pressure
U output signal
c constant (pressure unit dependent)
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