P = 10, U = c + log, Valid in the range 5×10 – INFICON PSG55x ATM to Medium Vacuum Gauge User Manual
Page 22: Mbar <p< 1000 mbar, Output signal u [v] pressure p
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22
tina60e1-a (2011-04)
Measurement range 1.57 … 8.875 V
Output signal U [V]
Pressure p
1E+05
1E+04
1E+03
1E+02
1E+01
1E+00
1E–01
1E–02
1E–03
1E–04
1E–05
0.0 0.5 1.0 1.5
2.5
3.5
4.5
5.5
6.5
7.5
8.5
2.0
3.0
4.0
5.0
6.0
7.0
8.0
9.0
1.57
8.875
9.5
mbar
Pa
Torr
Err
or
p = 10
(U-c)
⇔
U = c + log
10
p
valid in the range
5×10
-5
mbar <p< 1000 mbar
U p
c
U p
c
[V] [mbar] 5.8751 [V] [micron]
3
[V] [µbar] 2.8751 [V] [Pa]
3.8751
[V] [Torr]
6
[V] [kPa]
6.8751
[V] [mTorr]
3
where p pressure
U output signal
c constant (pressure unit dependent)
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