P = 10, U = c + log, Measurement range 1.2 … 8.5 v – INFICON PSG55x ATM to Medium Vacuum Gauge User Manual
Page 19: Valid in the range 5×10, Mbar <p< 1000 mbar, Output signal u [v] pressure p
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tina60e1-a (2011-04)
19
Measurement range 1.2 … 8.5 V
Output signal U [V]
Pressure p
1E+05
1E+04
1E–03
1E–04
1E–05
0.0 0.5 1.0 1.5
2.5
3.5
4.5
5.5
6.5
7.5
8.5
2.0
3.0
4.0
5.0
6.0
7.0
8.0
9.0
1.2
mbar
Pa
Torr
1E+03
1E+02
1E+01
1E+00
1E–01
1E–02
Er
ro
r
p = 10
(U-c)
⇔
U = c + log
10
p
valid in the range
5×10
-5
mbar <p< 1000 mbar
U p
c
U p
c
[V] [mbar]
5.5
[V] [micron]
2.625
[V] [µbar]
2.5
[V] [Pa]
3.5
[V] [Torr]
5.625 [V] [kPa]
6.5
[V] [mTorr]
2.625
where p pressure
U output signal
c constant (pressure unit dependent)
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