2 technical data – INFICON HPG400 ATM to High-Vacuum Gauge User Manual
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tina31e1 (2004-05) HPG400 v1.om
2 Technical Data
Measuring range (air, N
2
)
Hot cathode
Pirani (control range)
2×10
-6
… 1 mbar
1×10
-2
… 1000 mbar
Accuracy
10
-5
… 1 mbar
±15% of reading
(valid between 10
-5
mbar and change-
over threshold setting (<P
↔ HP>,
→ 25).
Repeatability
10
-5
… 10
-1
mbar
10
-1
… 100 mbar
(after 10 min. stabilization)
±2% of reading
±30% of reading
Gas type dependence
→
Appendix B
Switching (changeover) threshold
(selectable from 5 defined setpoints)
1 mbar
5×10
–1
mbar
2×10
–1
mbar
1×10
–1
mbar
5×10
–2
mbar
Emission current
from 1 mbar
to 2×10
–6
mbar
continually rising
4 µA
130 µA
Anode voltage
180 V
Voltage range
0 … +10.2 VDC
Measuring range
Hot cathode
Pirani
1.5 … 7.5 V
8.5 … 9.75 V
Overrange hot cathode
Underrange hot cathode
Overrange Pirani
Underrange Pirani
7.5 V
≤ U ≤ 8.0 V
0.5 V
≤ U ≤ 1.5 V
9.75 V
≤ U ≤ 10.2 V
8.0 V
≤ U ≤ 8.5 V
Relationship voltage-pressure
Hot cathode
Pirani
logarithmic,
→
Appendix A
1.00 V/decade
0.25 V/decade
Error signals
Hot cathode error
Pirani error
≤+0.3 V, → 40
≤+0.5 V, → 40
Min. load impedance
10 k
Ω, short cicuit proof
Resistor
56 k
Ω between pin 10 and pin 5
(sensor cable connector)
Measurement
Emission
Output signal
Identification of the gauge