ALTANA Micro-Wave-Scan Manual - Manual (Page 41)

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Advanced Configuration
10. Advanced Configuration
10.1 Correction
Defects on the sample surface, such as scratches
or craters, can cause major errors in measurement
values. When Correction is activated, the affected
scan areas are cut out and the measurement
values are calculated from the sanitized data.
Pressing “operate” turns Correction on and off.
10.2 Plausibility Control
An option for comparing the corrected and
uncorrected measurement value. The greater the
difference between the corrected and uncorrected
data, the more critical is the surface defect. If the
difference is greater than 20 %, the measurement
will be evaluated as a faulty measurement. An
error message appears and a new measurement is
then needed.
Pressing “operate” turns Plausibility Control on and
off.