INFICON T-Guard Leak Detection Sensor Interface description - Manual (Page 15)

RS232
ASCII Interface
Proto
c
ol
15
jins85e1 2.fm Interface Description (1101)
Command
word1
Command
word2
Command
word3
Parameter Statement Read
Set
Example Response
*IDN identification of the unit –
:DEVice name of the unit R *IDN:DEV? T-Guard
:VERsion Software version R *IDN:VER? 1.30.00
:SERial serial number of the unit R *IDN:SER? <11 digits>
:WiseSerial serial number of the WISE Technology
TM
Sensor
R *IDN:WS? <11 digits>
*PURGE Purge the measurement line with valves in
GROSS configuration, may stop with
Warning 45.
--
:START Start Purge S *PURGE:START OK
:STOP Stop Purge S *PURGE:STOP OK
*MEASure –
:Pressure –
:FOREline: pre-vacuum pressure (in actual unit) R *MEAS:P:FORE? 268
:FILTER filtered sensor current R *MEAS:FILTER? 2.16E-10 A
:TEMPeratur :Electronic temperature of the electronics inside the unit
(in °C)
R *MEAS:TEMP:E 41.5
*READ read leak rate in set unit
(if there is no valid value the result is 1.0,
without unit)
R *READ? 2.50E-4 mbar*l/s
<unit> unit = sccm; mbar*l/s; Pa*m3/s; atm*cc/s;
Torr*l/s
(if there is no valid value the result is 1.0,
without unit)
R
R *READ mbar*l/s?
*READ Pa*m3/s? 2.50E-4 mbar*l/s
2.50E-5 Pa*m3/s
*STANDBY valves V1, V2 and V3 are closed; sensor
operates at low pressure
S *STANDBY OK
:STOP Stops Standby. Puts back valves in previous
position.
S *STANDBY:STOP OK
*START start measurement (and wake up from
standby if necessary)
S *START OK