Figure 3-7 on, Figure 3-7, Compos er syst em i/o option bo ard – INFICON Composer Gas Concentration Controller User Manual
Page 76: Compos er se nsor bubbler sourc e mfc
3 - 14
IP
N 07
4-
28
9L
Composer Operating Manual
F
igu
re
3
-7
. Bu
lk F
low
in
st
a
llatio
n
sch
eme
sh
owin
g
option
a
l Bulk
Fl
ow Cabl
e’
s de
ta
ils. 4.99
meg
ohm re
sisto
r
is in
cl
ude
d within
the
hood
of the
mating system I/O
connector
. W
ir
e
s ar
e twisted p
a
ir;
colors
as shown;
gr
ounds
no
t shown
for clarity
.
In
su
re tha
t the grou
nds fro
m
the MFC’
s
p
o
wer s
upp
lies are main
ta
ined
o
r the MFCs may be damag
ed.
pin
4
pin
6
pi
ns 1,5
,7
(0
-5
volt
an
a
log
)
(0
-5
volt
an
a
log
)
br
ow
n, gr
ey
gr
oun
d
gr
ee
n,
g
rey
g
ro
un
d
(0
-2
4 v
ol
t d
ig
ita
l)
(0
-5
volt
an
a
log
)
(0
-5
volt
an
a
log
)
pin
21
pi
n 7
pin
8
pi
n 1
0
4.
99 M
pi
n 1
1
pi
ns
13
,14
,15
,16
,1
7
NO
K4
NC
K5
w
hit
e, vio
let
gr
oun
d
re
d,
y
el
low g
ro
un
d
or
an
ge
, blu
e g
ro
un
d
Aux.
O
U
T
Aux
. I
N
Aux.
G
nd
Dil./C
on
c.
O
ut
B
N
C
Co
ntr
o
l IN BNC
Cont
rol OUT BNC
COMPOS
ER
Syst
em I/O
Option Bo
ard
In
te
rco
n
ne
ct Ca
ble
IP
N
60
0-
10
96
-P
5, 1
0
, or
2
0
Compos
er
Se
nsor
Bubbler
Sourc
e
MFC
Co
ntro
l
In
p
ut
Flow
Re
ad
ou
t
CF Set
poin
t
CL Control
ON/OF
F
Con
ce
n
tr
at
ion Reado
ut
MFC Readba
ck
Reac
tor
Cont
rol
Sy
st
em
Bu
lk
Flow W
ir
e
Ha
rne
s
s
IPN 60
0-
11
4
9-
P
1
K4
an
d
K5
are
to
gg
le
d
by
firm
war
e
See
sect
io
n 4
.3
.6 f
o
r de
ta
ils