Document Outline

• All information herein is subject to periodic updates. Inquiries concerning this manual should be...
• is a registered trademark of Advanced Energy Industries, Inc.
• 2000© Copyright by Advanced Energy Industries Inc. All rights reserved. Without written permissio...
• Advanced Energy Industries, Inc.
• 1625 Sharp Point Drive
• Fort Collins, Colorado 80525 USA
  • Table of Contents
  • List of Figures
  • List of Tables
• Introduction
  • This chapter contains several kinds of introductory information.
  • Read This Section!
    • To ensure safe operation, you should read and understand this manual before you attempt to instal...
  • Using this Manual to Find Information for Your Generator
    • The Apex generator can be ordered with many configurable options such as different output levels,...
  • Understanding PIN Numbers and Apex Configuration
    • The options installed on any Apex generator (that is, the configuration of the generator) are def...
      • Figure 1-1. Serial number identification tag
    • The PIN is a 17-position alpha-numeric that represents the configuration of your generator and id...
    • Configuration positions— A 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17
      • The “A” that precedes the PIN defines the product as an Apex generator, and it is not counted as ...
  • Using the PIN to Locate Information in the Manual
    • This manual uses the PIN to help you identify the manual sections that apply to your unit. To beg...
    • Once you have located the PIN, you are ready to begin using the manual.
    • The manual provides two basic tools to help you use the PIN in locating correct information for y...
      • This section of the manual provides information for the: DeviceNet option PIN position 6, (A 1 2 ...
      • Figure 1-2. Example configuration note
  • Using the PIN to Identify Apex Options
    • Table 1-1 shows all the options associated with each PIN position. When appropriate, it also prov...
    • Table 1-1. Apex PIN Positions and Associated Options
    • 1
      • Output frequency
      • 0—N/A
      • 1—4 MHZ, ±0.005%
      • 2—12.56 MHz, ±0.005%
      • 3—13.56 MHZ, ±0.005%
      • 4—27.12 MHz, ±0.005%
      • 5—40.68 MHz, ±0.005%
      • For more information on frequency and other specifications, see “Electrical Specifications” on pa...
    • 2
      • Power output
      • A—1000 W
      • B—1500 W
      • C—2000 W
      • D—3000 W
      • E—4000 W
      • F—5500 W
      • G—8000 W
      • H—10000 W
      • J—5000 W
      • K—1000 HALO
      • L—1500 HALO
      • M—3500 W
      • N—7000 W
      • For more information on power output and other specifications, see “Electrical Specifications” on...
    • 3
      • Input voltage
      • 0—208 V nominal, 187 to 229 Vac, 3f, 47 to 63 Hz, with breaker
      • 1—400 V nominal, 360 to 440 Vac, 3f, 47 to 63 Hz, with breaker
      • 2—reserved
      • 3—208 V nominal, 187 to 229 Vac, 3f, 47 to 63 Hz, without breaker
      • 4—400 V nominal, 360 to 440 Vac, 3f, 47 to 63 Hz, without breaker
      • 5—220,208 to 229 Vac, 1 phase, 47/63 Hz w/o breaker
      • For more information on input voltage and other specifications, see “Electrical Specifications” o...
    • 4
      • Packaging
      • A—frame mount (£ 5500 W)
      • B—frame mount with rack ears (1/2 rack) (utilities)
      • C—integrated rack mount
      • D—1/2 integrated rack mount (left)
      • E—1/2 integrated rack mount (right)
      • F—exclusive option #1
      • G—exclusive option #2
      • H—exclusive option #3
      • J—exclusive option #4
      • K—on board frame mount, opposite end LED’s
      • L—on board frame mount, opposite end LED’s w/4 handles
      • M—on board frame mount, opposite end LED’s w/2 handles
      • N—frame mount w/ rack ears (1/2 rack) (opposite)
    • 5
      • Panel
      • 0—none (on-board, frame mount)
      • 1—integrated rack mount with blank panel
      • 2—integrated rack mount with passive digital display (see “Apex Status Indicators (LEDs)” on page...
      • 3—N/A
      • 4—exclusive option #1
      • For panel illustrations, see “Apex Panel Illustrations” on page480.
    • 6
      • Serial I/O
      • 0—default (RS-232 with AE Bus) (see “Host Port—RS- 232 With AE Bus” on page437)
      • 1—Multidrop RS-485 with AE Bus (Currently NOT available)
      • 2—DeviceNet (see “Host Port—DeviceNet” on page472)
      • 3—Profibus (see “Host Port—Profibus” on page458)
      • 4—exclusive option #1
      • 5—DeviceNet (serial)
      • 6—exclusive option #3
      • 7—exclusive option #2
    • 7
      • Serial Port 2
      • 0—default (no secondary serial port)
      • 1—RS 232
      • 2—RS 485
    • 8
      • User port options
      • A—no User port
      • B—25-pin APEX standard (see “25-Pin Apex Standard User Port” on page42)
      • C—25-pin custom RFG compatible
      • D—15-pin, exclusive option #2 (see “15-Pin User Port (Exclusive—Option D)” on page416)
      • E—15-pin, exclusive option #3 (see “15-Pin User Port (Exclusive—Option E)” on page426)
      • F—N/A
      • G—exclusive option #4
    • 9
      • Output impedance
      • A—50 W
      • B—exclusive option #1
      • C—exclusive option #2
      • D—exclusive option #5
      • E—exclusive option #6
      • F—exclusive option #3
      • G—exclusive option #4
      • H— exclusive option #7
      • J—exclusive option #8
    • 10
      • On-board RF output connector location
      • 0—opposite end from water connections
      • 1—utilities end (near water connections)
    • 11
      • Output connector
      • 0—exclusive option #1
      • 1—7/16 connector)
      • 2—SQS‘ connector
      • 3—LC connector
      • 4—HN
      • 5—N
      • 6—exclusive option #2
      • For further information see “Connecting Output Power” on page55.
    • 12
      • RF measurement
      • 0—directional coupler
      • 1—V/I sensor
    • 13
      • AC power input
      • A—ODU connector (see “ODU Connector” on page57)
      • B—Non-terminated 3 m, 4-conductor, shielded pigtail (see “NonTerminated, four-Conductor Pigtail” ...
      • C—Non-terminated 12¢, 4-conductor, pigtail (see “NonTerminated, four-Conductor Pigtail” on page58)
      • D—Harting Type Han-Q (see “Harting Type Han-Q Connector” on page59)
      • E—4-terminal, stud mount
      • F—15´ 4-conductor, with a Hubbell CS8365C plug
      • G—5´ Harting
      • H—Term 3m, 4 cond, shielded pigtail Marinco 3015P
      • J—5’ terminated, 4 conductor, SH with contact LS1 BF.F6 5+PE (30A)
      • K—ODU connector with 20 degree rotation
      • L—Harting Type Han-Q (16A) rotated 180 degrees
      • M—6’,4 conductor with #10 ring lugs on each wire
    • 14
      • Pulsing
      • 0—no pulsing
      • 1—pulse (see “Understanding and Setting Up Pulsing Output” on page513)
    • 15
      • CEX
      • 0—default (no CEX)
      • 1—CEX add (see “To Use the Common Exciter (CEX) Feature (optional)” on page512)
      • 2—CEX w/1 Meter Cable (see “To Use the Common Exciter (CEX) Feature (optional)” on page512)
    • 16
      • Water fitting threads
      • 0—default to 3/8 BSP female (metric threads)
      • 1—3/8 NPT female
      • 2—3/8 BSP to 1/2" NPT
      • For information on connecting the water, see “Connecting Cooling Water” on page54.
    • 17
      • Custom configuration
      • A—standard configurations
      • B—exclusive option #1
      • C—exclusive option #2
      • D—exclusive option #3
      • E—exclusive option #4
  • Interpreting the Manual and Unit Labels
    • The following sections provide information to help you interpret the use of type in the manual as...
  • Type Conventions
    • To help you quickly find what is being discussed, the manual presents certain words and phrases i...
  • Icons (Symbols)
    • This symbol represents important notes concerning potential harm to people, this unit, or associa...
    • We include this symbol in Danger, Warning, and Caution boxes to identify specific levels of hazar...
    • The following symbols could appear on labels on your unit.
    • Capacitor charge
    • Hazardous Voltage
  • Safety
    • Do not attempt to install or operate this equipment if you have not first acquired proper training.
  • Product Safety/Compliance
    • Certain options of the Apex have been tested for and comply with the following Directives and Sta...
  • Directives and Standards
    • The following tables list the Electromagnetic Compatibility (EMC) and Safety directives and stand...
    • Table 1-2. Electromagnetic Compatibility (EMC)
    • 89/336/EEC
    • EC Council directive on the approximation of the laws of the Member States relating to electromag...
    • 47 CFR Part 18
    • Code of Federal Regulations - Limits and Methods of Measurement of Radio Interference Characteris...
    • EN 50082-2
    • Electromagnetic Compatibility (Generic Immunity Standard— Industrial)
    • EN 55011
    • Limits and Methods of Measurement of Radio Disturbance Characteristics of Industrial, Scientific,...
    • Table 1-3. Safety
    • 73/23/EEC
    • EC Council directive on the harmonization of the laws of the Member States relating to electrical...
    • SEMI S2-0200
    • Safety Guidelines for Semiconductor Manufacturing Equipment
    • UL 1012
    • Power units other than class 2
    • EN 50178
    • Electronic Equipment For Use In Electrical Power Installations
    • CSA C22.2 No. 107.1-95
    • General Use Power Supplies—Industrial Products
    • This device must be installed and used only in compliance with the standards listed in addition t...
  • Certification
    • Certain options of this product are certified by:
    • For more information, refer to the letter of conformance (US) or declaration of conformity (EU) a...
  • Installation Requirements
    • In order for proper installation to be completed on the Apex generator, please take note of the f...
  • Conditions of Use
    • To be in compliance with the stated directives and standards, you must meet the following conditi...
• Theory
  • General Description
    • The Apex™ product line consisting of generators and delivery system products defined by a matrix ...
    • The Apex products can be configured to three basic package styles. The Apex products may be confi...
    • Other optional features include high repetition rate, variable duty cycle pulsing and common exci...
  • Functional Description
    • In the following section, an overview of the functional description about the Apex products is di...
  • Regulation
    • The Apex generator regulates on forward power, delivered power, or bias voltage measured at the o...
  • Cooling
    • Apex generators are water-cooled only.
  • Interlock
    • The Apex generator provides a system interlock connection through the User port. The RF output co...
  • Optional Water Solenoid
    • The Apex generator provides water solenoid control circuitry that can be accessed through a conne...
  • Grounding
    • The Apex generator has two holes located on the rear panel to attach the system RF ground to. One...
  • Protection
    • The Apex generator protects itself from damage from the following conditions.
  • Theory of Operation
    • In this section a bock diagram is designed to help the User understand the process by which the A...
      • Figure 2-1. Theory of operation block diagram
    • Table 2-1. Block Diagram Explanation
    • (1) User port (Analog I/O)
    • This section provides user interface and CEX functions.
    • (2) Driver/Exciter
    • This section generates power at the designated output frequency to drive the main RF sections.
    • (3) RF Amplifier
    • This section generates RF power.
    • (4) RF Measurement
    • This section samples the output signal and sends it to the sensor electronics.
    • (5) Digital Controller
    • This section is the main processor and data acquisition section. It also provides host communicat...
    • (6) Sensor Electronics
    • This section detects RF samples and sends them to the microprocessor.
• Specifications
  • This chapter lists the specifications of the Apex generator in the following sections:
  • In some cases, specifications for all Apex units are the same, but in other cases, the unit speci...
  • Physical Specifications
    • Table 3-1 describes the physical specifications of the Apex generator. In some cases, the specifi...
    • Table 3-1. Physical Specifications
    • Packaging
    • A—frame mount (£ 5500 Watts)
    • B—frame mount w/rack ears (1/2 rack) (rack ears on same end of the unit as the water connectors)
    • C—integrated rack mount
    • D—1/2 dual integrated rack mount (left)
    • E—1/2 dual integrated rack mount (right)
    • F—exclusive option #1
    • G—exclusive option #2
    • H—exclusive option #3
    • J—exclusive option #3
    • K—on-board frame mount, opposite end LEDs
    • L—on-board frame mount, opposite end LEDs, with 4 handles
    • M—on board frame mount, opposite end LEDs, with 2 handles
    • N—frame mount with rack ears (1/2 rack) (opposite end from water connectors)
    • Size
    • 13.34 cm (H) x 21.6 cm (W) x 48.47 cm (D) 5.25² (H) x 8.5² (W) x 19.19² (D) See Figure 5-1 on pag...
    • Weight
    • 18.2 kg (40 lbs.)
    • Clearance
    • No special requirements
    • AC power input connector
    • A—ODU connector (see “ODU Connector” on page57)
    • B—Non-terminated 3 m, 4-conductor, shielded pigtail (see “NonTerminated, four-Conductor Pigtail” ...
    • C—Non-terminated 12¢, 4-conductor, pigtail (see “NonTerminated, four-Conductor Pigtail” on page58)
    • D—Harting Type Han-Q (see “Harting Type Han-Q Connector” on page59)
    • E—4-terminal, stud mount
    • F—15´ 4-conductor, with a Hubbell CS8365C plug
    • G—5´ Harting
    • H—Term 3m, 4 cond, shielded pigtail Marinco 3015P
    • J—5’ terminated, 4 conductor, SH with contact LS1 BF.F6 5+PE (30A)
    • K—ODU connector with 20 degree rotation
    • L—Harting Type Han-Q (16A) rotated 180 degrees
    • M—6’,4 conductor with #10 ring lugs on each wire
    • RF output connector
    • 0—exclusive option #1
    • 1—7/16 connector (see “Connecting Output Power” on page55)
    • 2—SQS‘connector (see “Connecting Output Power” on page55)
    • 3—LC connector (see “Connecting Output Power” on page55)
    • 4—HN (see “Connecting Output Power” on page55)
    • 5—N (see “Connecting Output Power” on page55)
    • 6—exclusive option #2
    • RF Connector location
    • 0—opposite end from water connections
    • 1—utilities end (near water connections)
    • Water control connectors
    • Switchcraft™ #L712A
    • User port (analog I/O) connector
    • A—no analog port
    • B—25-pin APEX standard (see “25-Pin Apex Standard User Port” on page42)
    • C—25-pin custom RFG compatible
    • D—15-pin, exclusive option #2 (see “15-Pin User Port (Exclusive—Option D)” on page416)
    • E—15-pin, exclusive option #3 (see “15-Pin User Port (Exclusive—Option E)” on page426)
    • F—N/A
    • G—exclusive option #4
    • Host port (serial I/O) connector
    • 0—9-pin, shielded, female, subminiature-D (see “Host Port—RS-232 With AE Bus” on page437)
    • 1—9-pin, shielded, female, subminiature-D (Currently NOT available)
    • 2—5-pin, male, Lumberg RSF 5/0.5 or Turck FS 4.5 (see “Host Port—DeviceNet” on page472)
    • 3—9-pin, shielded, female, subminiature-D (see “Host Port—Profibus” on page458)
    • 4—exclusive option #1
    • 5—5-pin, male, Lumberg RSF 5/0.5 or Turck FS 4.5
    • 6—9-pin, shielded, female, subminiature-D
    • 7—exclusive option #2
    • CEX connector
    • Female LIMO#EPL.00.250.NTN
    • Coolant connectors
    • 0—3/8 BSP female
    • 1—3/8 NPT adapters (adapters from 3/8 BSP female threads in the manifold)(increases unit length)
    • 2—3/8 BSP to 1/2² NPT
    • For information on connecting the water, see “Connecting Cooling Water” on page54.
    • Panel
    • 0—on-board frame mount
    • 1—Integrated rack-mount with blank panel
    • 2—Integrated rack-mount with passive digital display
    • 3—Integrated rack-mount with active digital display
    • 4—exclusive option #1
    • RF measurement option
    • 0—Coupler
    • 1—V/I probe
  • Electrical Specifications
    • Table 3-2, Table 3-3, and Table 3-4 describe the input power, output power, and other electrical ...
  • Input Power Specifications
    • Table 3-2 describes the input power specifications for the Apex generator.
    • Table 3-2. Input Power Specifications
    • Line voltage
    • 0—208 V nominal, 187 to 229 Vac, 3f
    • 1—400 V nominal, 360 to 440 Vac, 3f
    • 2—n/a
    • 3—208 V nominal, 187 to 229 Vac, 3f
    • 4—400 V nominal, 360 to 440 Vac, 3f
    • Line frequency
    • 47 to 63 Hz
    • Line current
    • Typical A/f and circuit breaker rating for units with 208Vac nominal input (PIN position 3, opti...
    • Typical A/f and circuit breaker rating for units with 400Vac nominal input (PIN position 3, opti...
  • Output Electrical Specifications
    • Table 3-3 describes the output specifications for the Apex generator.
    • Table 3-3. Output Specifications
    • Regulation modes
    • Output frequency
    • 0—N/A
    • 3—13.56 MHZ, ±0.005%
    • Full-rated output power
    • (Minimum into a 50 W, non- reactive load)
    • A—1000 W
    • B—1500 W
    • C—2000 W
    • D—3000 W
    • E—4000 W
    • F—5500 W
    • J—5000 W
    • K—1000 W high accuracy low output (HALO)
    • L—1500 W HALO minimum into a 50 W, non-reactive load
    • M—3500 W
    • Output impedance
    • A—50 W
    • B—exclusive option #1
    • C—exclusive option #2
    • D—exclusive option #5
    • E—exclusive option #6
    • F—exclusive option #3
    • G—exclusive option #4
    • H—exclusive option #7
    • J—exclusive option #8
    • Delivered power into 2:1 VSWR loads
    • B—1.5kW = 1125W
    • D—3kW = 2000W
    • F—5.5kW = 3350W
    • Delivered power into 3:1 VSWR loads
    • B—1.5kW = 650W
    • D—3kW = 1200W
    • F—5.5kW = 1900W
    • Output protection—Apex generators sense and employ several parameters for protection
      • Reflected power limit
    • 20% of maximum forward power for units rated for less than 5500 W. 1000 W for 5500 W units. (PIN ...
      • Dissipation limit
    • Maximum PA dissipation—non-latching alarm LED
      • Low/high line bus
    • Bus voltage outside spec window—latching alarm LED
      • Over-temperature
    • Over-temp condition—latching alarm LED preceded by non-fault warning (user setting).
      • Output power range
    • All generators except the HALO will allow setpoints between 1% and 100% of full scale. The except...
    • Output power regulation accuracy
      • Into 50 W non-reactive load
      • Into 3:1 VSWR non- reactive load
    • ± 3% of setpoint (load power regulation), over all load phase angles, or ± 0.25% of full-rated ou...
    • Load regulation as a function of line regulation
    • Less than 0.1% change in output power for 10% change in ac line voltage
    • Load regulation as a function of temperature—(performance in accordance with the output power reg...
      • Ambient air temperature range
    • +5°C to +40°C
      • Cooling water temperature range
    • +5°C to +35°C
    • Spurious outputs—Referenced to fundamental signal at full-rated output when operated in a 50 W no...
      • Harmonic related
    • -40 dBc
      • Non-harmonic related
    • -50 dBc
    • Warm up
    • Approximately 2 s from ac-on to RF-on
    • RF On Response time
    • < 7 ms (6.4 ms typical)
    • Turn-off/decay time
    • 10 µs until output decays to 1% of maximum rated value.
    • Power repeatability
    • £ 0.5% over time for same generator for setpoints >500W. 1% generator to generator as measured ...
    • Power cycles, standard options
    • 6 million cycles, 0 to full power into a matched load
    • 360 kilocycles, 0 to full power into high dissipation load
    • Power Cycles with DC heating option
    • 30 million cycles, 0 to full power into a matched load
    • 5 million cycles, 0 to full power into high dissipation load
  • Other Electrical Specifications
    • Table 3-4 describes the other electrical specifications for the Apex generator.
    • Table 3-4. Other Electrical Specifications
    • Efficiency (line to load)
    • 60%, typical @ full-rated power, nominal line
    • Power factor
    • > 0.96
    • Maximum leakage current
    • 3.5 mA
    • Master - Slave / CEX (The Apex generator automatically locks the RF output signal phase to the co...
      • Phase relationship (RF output inphase with the CEX input signal)
    • 0° ± 5°
      • CEX In
      • CEX Out
  • Cooling Specifications
    • Table 3-5 describes the cooling specifications for the Apex generator.
    • Table 3-5. Cooling Specification 
    • Temperature
    • +35°C (+95°F)
    • Flow rate
    • For £ 3kW 7.6 1pm (2 gpm) For > 3kW 11.4 1pm (3 gpm)
    • Pressure
      • Minimum pressure differential (supply to drain) required to achieve specified minimum flow rates)
    • For £ 3kW 0.9 Bar (13psi) For > 3kW 2 Bar (29 psi)
      • Maximum pressure rating
    • 6.9 Bar (100 psi)
    • Heat removal
    • Contaminates
    • The following specifications are recommended for the water used to cool the Apex generator:
  • Graphical Representations of Flow Rate
    • The following graph shows how flow (gpm) lessens as the pressure (psi) drops.
      • Figure 3-1. Flow Rate vs. Pressure Drop
    • The following graph shows how Water Flow vs. Inlet Temp for all three Apex Units. It represents t...
      • Figure 3-2. Water flow vs. Inlet Temperature
  • Environmental Specifications
    • Table 3-6 and Table 3-7 provide climatic and other environmental specifications for the Apex gene...
    • Table 3-6. Climatic Specifications
    • Class 3K3
    • 5˚C to +40˚C
    • +41˚F to +104˚F
    • Class 3K2
    • 10% to 85% 1
    • +2 g/m3 to +25 g/m3
    • Class 3K3
    • 80 kPa to 106 kPa
    • 800 mbar to 1060 mbar (approximately 2000 m above sea level)
    • Class 1K4
    • -25˚C to +55˚C
    • -13˚F to +131˚F
    • Class 1K3
    • 5% to 95%
    • +1 g/m3 to +29 g/m3
    • Class 1K4
    • 80 kPa to 106 kPa
    • 800 mbar to 1060 mbar (approximately 2000 m above sea level)
    • Class 2K3
    • -25˚C to +70˚C
    • -13˚F to +158˚F
    • Class 2K3
    • 95%2
    • +60 g/m3 3
    • Class 2K3
    • 66 kPa to 106 kPa
    • 660 mbar to 1060 mbar (approximately 3265 m above sea level)
    • Table 3-7 shows other environmental specifications for the Apex generator.
    • Table 3-7. Environmental Specifications
    • Overvoltage
    • Category II
    • Pollution Degree
    • 2
• Interfaces and Indicators
  • This chapter contains information on the Apex communication interfaces and status indicators (LED...
  • Not all of these sections apply to any one Apex unit. To identify the sections that apply to your...
  • Apex User Port Options
    • The following sections provide information for each of the User port options available with the 1...
    • Not all of these sections apply to any one Apex unit. To identify the section that applies to you...
  • 25-Pin Apex Standard User Port
    • The following section describes the Apex standard 25-pin User port. To determine if your Apex uni...
      • This section of the manual provides information for the: Apex standard 25-pin User port option PI...
    • This User port is the standard option.
    • The User port uses a 25-pin, shielded, female, subminiature-D connector.
      • Figure 4-1. User Port connector 25 Pin APEX Standard
    • Unless otherwise specified, all analog signals are 0 to 10 V while all digital signals are 5 to 2...
    • Ground/Return lines are floating and need to be connected as close to the system as possible.
    • Satisfying Minimal Requirements for the 25-Pin User Port
      • Regardless of whether you are controlling and monitoring the generator through the User port or t...
      • If you are not using the User port to control or monitor the unit, you can use a “dummy” or “chea...
      • If desired, you can add an emergency off switch in series with the RF PWR ON signal (pin 4) or ti...
    • Interface Cabling Requirements for 25-pin user port
      • The cable used to connect the Apex generator’s User port to the system controller must be a shiel...
    • Pin Descriptions for the 25-Pin User Port
      • Table 4-1 provides the connector pin descriptions for this User port interface. The pin numbers a...
      • Table 4-1. User Port 25-Pin APEX Standard Pin Descriptions
    • 1
    • Digital Output
      • See signal pin 14
    • 2
    • 15
    • Analog output
      • This signal provides a linearly scaled read back of reflected power.
      • 0 to 10V = 0 to maximum rated power output as defined by configuration PIN in Table 1-1 position ...
      • See Wiring Diagram 4-2.
      • Pin 15 must be grounded.
    • 3
    • 16
    • Analog output
      • This signal provides a linearly scaled read back of forward power when the generator is operated ...
      • 0 to 10V = 0 to maximum rated power output as defined by configuration PIN position 2 in Table 1-1.
      • See Wiring Diagram 4-1. for wiring diagram.
      • Pin 16 must be grounded
    • 4
    • 17
    • Digital input
      • When a positive voltage between 4 and 30 V is applied to this pin RF output is enabled. Once the ...
      • See Wiring Diagram 4-5.
    • 5
    • 18
    • Analog input
      • This pin linearly controls the RF output of the generator.
      • 0 to 10V = 0 to maximum rated power output as defined by configuration PIN position 2 in Table 1-1.
      • See Wiring Diagram 4-3.
    • 6
    • 19
    • Digital input
      • This pin is used in conjunction with signal pin 7 to allow the generator to regulate its power ba...
      • 0 to 10V = 0 to maximum rated power output as defined by configuration PIN position 2 in Table 1-1.
      • See Wiring Diagram 4-6.
    • 7
    • 20
    • Analog input
      • This pin is used in conjunction with signal pin 6 to allow the generator to regulate its power ba...
      • See Wiring Diagram 4-4.
    • 8
    • 21
    • Digital input
      • Applying a positive dc voltage between 4 and 30 V to this pin causes the generator to regulate on...
      • See Wiring Diagram 4-7.
    • 9
    • Digital Output
      • See Signal pin 22
    • 10
    • 23
      • This pin when connected externally to pin 23 closes the interlock and allows the RF output to be ...
      • See Wiring Diagram 4-12.
    • 11
    • Digital Output
      • See Signal Pin 24
    • 12
    • 25
    • Digital output
      • When the generator is successfully phase-locked to an external oscillator, a low (opto- coupler o...
      • See Wiring Diagram 4-11.
    • 13
    • 21
    • Analog output
      • This pin, referenced to ground, provides a +15 Vdc auxiliary supply for external use.
      • See Wiring Diagram 4-13.
    • 14
    • 1
    • Digital output
      • When the output is equal to the requested setpoint, a low (opto- coupler output) impedance is cre...
      • See Wiring Diagram 4-8.
    • 15
    • Analog output
      • See pin 2
    • 16
    • Analog output
      • See pin 3
    • 17
    • Digital input
      • See pin 4
    • 18
    • Analog input
      • See pin 5
    • 19
    • Chassis ground
      • This pin represents DC ground connection common to chassis ground.
    • 20
    • Analog input
      • See pin 7
    • 21
    • Chassis ground
      • Chassis ground connection common to dc ground
    • 22
    • 9
    • Digital output
      • When an internal overtemperature shutdown condition is detected, a low (opto-coupler output) impe...
      • See Wiring Diagram 4-9.
    • 23
    • 10
      • See Pin 10.
    • 24
    • 11
    • Digital output
      • When the interlocks are satisfied and the AC input voltage is within its specification, a low (op...
      • See Wiring Diagram 4-10.
    • 25
    • Digital Output
      • See pin 12
      • Wiring Diagrams for the Standard 25-Pin User Port
        • The diagrams in this section provide wiring information to properly connect to the Apex standard ...
  • 15-Pin User Port (Exclusive—Option D)
    • To determine if your Apex unit has this interface, use the configuration PIN from your Apex unit ...
      • This section of the manual provides information for the: Apex 15-pin User port, option D PIN posi...
    • This 15-pin User port option offers only basic control and monitoring capability.
    • The User port uses a 15-pin, shielded, female, subminiature-D connector.
      • Figure 4-2. User port connector 15 Pin Exclusive for configuration D
    • Satisfying Minimal Requirements for Option D 15-Pin User Port
      • Regardless of whether you are controlling and monitoring the generator through the User port or t...
      • If you are not using the User port to control or monitor the unit, you can use a “dummy” or “chea...
      • If desired, you can add an emergency off switch in series with the RF POWER ENABLE signal (pins 4...
    • Interface Cabling Requirements for Option D user port
      • The cable used to connect the Apex generator’s User port to the system controller must be a shiel...
      • Unless otherwise specified, all analog signals are 0 to 10V while all digital signals are 0 to 5V.
    • Pin Descriptions for Option D User Port
      • Table 4-2 provides the connector pin descriptions for the User port interface.
      • Table 4-2. User Port (15-pin) Connector Pins Exclusive for Configuration D 
    • 1
    • 6
      • POWER LIMIT STATUS
    • Digital output
      • When a +5 V signal is present at this pin a power limit is encountered; signal low represents nor...
      • See Wiring Diagram 4-19.
    • 2
    • 6
      • REFLECTED POWER MONITOR
    • Analog output
      • This analog signal provides a linearly scaled readback of the reflected power (1 V per 1 kW refle...
      • See Wiring Diagram 4-15.
    • 3
    • 6
      • FORWARD/LOAD POWER MONITOR
    • Analog output
      • This analog signal provides a linearly scaled readback of the forward power (when the generator i...
      • See Wiring Diagram 4-14.
    • 4
    • 6
      • RF POWER ENABLE
    • Digital input
      • RF output is enabled when a 4 to 30 V input (pin 9, RF ON BIAS, can be used as a voltage source) ...
      • See Wiring Diagram 4-17.
    • 5
    • 6
      • FORWARD/LOAD POWER SETPOINT
    • Analog input
      • This analog signal provides a linearly scaled control of the forward or load output power dependi...
      • See Wiring Diagram 4-16.
    • 6
      • SIGNAL COMMON
    • Chassis ground
      • This pin is Signal Common. Also connected to Apex generator chassis ground.
    • 7
    • 6
      • RF ON STATUS
    • Digital output
      • + 5 Vdc on this pin represents RF ON.
      • See Wiring Diagram 4-18.
    • 8
    • 6
      • EXTERNAL BIAS
    • Voltage reference
      • +15 Vdc provided to the User port through a 5.62 kW resistor.
      • See Wiring Diagram 4-20.
    • 9
    • 6
      • RF ON BIAS
    • Voltage reference
      • +15 Vdc provided to the User port through a 1.1 kW resistor. It can be used for a switch or relay...
      • See Wiring Diagram 4-21.
    • 10
      • UNASSIGNED
    • 11
    • 6
      • INTERLOCK
    • Analog Input
      • When connected together, these pins close the interlock and allows RF output to be enabled.
      • See Wiring Diagram 4-23.
    • 12
    • 6
      • RESERVED for PULSING ENABLE
    • Digital Input
      • This pin is currently reserved for future use.
    • 13
    • 6
      • FWD/LOAD POWER REGULATION
    • Digital Input
      • Load Power Regulation is enabled when a 4 to 30V input is present on this pin.
      • See Wiring Diagram 4-22.
    • 14
      • UNASSIGNED
    • 15
      • UNASSIGNED
      • Wiring Diagrams for Option D 15-Pin User Port
        • The diagrams in this section provide wiring information to properly connect to the Apex 15-pin co...
  • 15-Pin User Port (Exclusive—Option E)
    • The following section describes the Apex 15-pin User port (configuration E). To determine if your...
      • This section of the manual provides information for the: Apex 15-pin User port (configuration E) ...
      • Figure 4-3. User Port connector 15 pin exclusive for Configuration E
    • This 15-pin User port option offers only basic control and monitoring capability.
    • The User port uses a 15-pin, shielded, female, subminiature-D connector.
    • Unless otherwise specified, all analog signals are 0 to 10 V, while all digital signals are 0 to ...
    • Satisfying Minimal Requirements for Option E 15-Pin User Port
      • Regardless of whether you are controlling and monitoring the generator through the User port or t...
      • If you are not using the User port to control or monitor the unit, you can use a “dummy” or “chea...
      • If desired, you can add an emergency off switch in series with the RF POWER ENABLE signal (pins 4...
    • Interface Cabling Requirements for Option E user port
      • The cable used to connect the Apex generator’s User port to the system controller must be a shiel...
    • Pin Description for Option E User Port
      • Table 4-3 provides the connector pin information for the User port interface.
      • Table 4-3. User Port (15-pin) Connector Pins Exclusive for Configuration E
    • 1
    • +24V (User Provided)
    • Voltage Input
      • +24V provided by user for devicenet LEDs, used for DeviceNet isolation.
      • See Wiring Diagram 4-24.
    • 2
    • 6
    • REFLECTED POWER MONITOR
    • Analog output
      • This analog signal provides a linearly scaled readback of reflected power.
      • 0 to 10V = 0 to maximum rated power output as defined by configuration PIN in Table 1-1 position ...
      • See Wiring Diagram 4-25.
    • 3
    • 6
    • FORWARD / LOAD POWER MONITOR
    • Analog output
      • This analog signal provides a linearly scaled readback of the forward power (when the generator i...
      • 0 to 10V = 0 to maximum rated power output as defined by configuration PIN in Table 1-1 position ...
      • See Wiring Diagram 4-26.
    • 4
    • RF POWER ENABLE
    • Digital input
      • This pin represents RF output being enabled when a 4 to 30V input (pin 9, RF ON BIAS, can be used...
      • See Wiring Diagram 4-27.
    • 5
    • 6
    • FORWARD / LOAD POWER SETPOINT
    • Analog input
      • This analog signal provides a linearly scaled control of the forward or load output power dependi...
      • 0 to 10V = 0 to maximum rated power output as defined by configuration PIN in Table 1-1 position 2.
      • See Wiring Diagram 4-28.
    • 6
    • SIGNAL COMMON
    • Chassis ground
      • Common for signal pins 2, 3, and 5. Connected to the Apex generator chassis ground.
    • 7
    • 8
    • RF ON STATUS
    • Digital output
      • When an RF ON STATUS condition is detected, a low (opto- coupler output) impedance is created bet...
      • See Wiring Diagram 4-29.
    • 8
    • RF ON STATUS RETURN
    • Digital output
      • See pin 7
    • 9
    • +15 Vdc
    • Voltage reference
      • +15 Vdc provided to the User port through a 1.1kW resistor. Can be used for a switch or relay con...
      • See Wiring Diagram 4-30.
    • 10
    • MODULE STATUS LED OUTPUT (GREEN)
    • Digital output
      • This pin provides the output for remote DeviceNet LED and is connected to the emitter of an opto-...
      • See Wiring Diagram 4-24.
    • 11
    • 12
    • INTERLOCK
      • When connected externally, these pins close the interlock and allows RF output to be enabled.
      • See Wiring Diagram 4-31.
    • 12
    • INERLOCK RETURN
      • See pin 11
    • 13
    • NETWORK STATUS LED OUTPUT (GREEN)
    • Digital output
      • This pin provides the output for remote DeviceNet LED and is connected to the emitter of an opto-...
      • See Wiring Diagram 4-24.
    • 14
    • MODULE STATUS LED OUTPUT (AMBER)
    • Digital output
      • This pin provides the output for remote DeviceNet LED and is connected to the emitter of an opto-...
      • See Wiring Diagram 4-24.
    • 15
    • NETWORK STATUS LED OUTPUT (AMBER)
    • Digital output
      • This pin provides the output for remote DeviceNet LED and is connected to the emitter of an opto-...
      • See Wiring Diagram 4-24.
      • Wiring Diagrams for Option E User Port
        • The diagrams in this section provide wiring information to properly connect to the Apex 15-pin Us...
  • Apex Host Port Options
    • The following sections provide information for each of the Host port options available with the 1...
    • Not all of these sections apply to any one Apex unit. To identify the section or sections that ap...
  • Host Port—RS-232 With AE Bus
    • This section describes the RS-232, AE Bus Host port interface, which is the standard Apex option....
      • This section of the manual provides information for the: RS-232, AE Bus Host port option PIN posi...
    • This Apex Host port, which is the standard, or default option, uses an RS-232 signal format and A...
    • AE manufactures an interface software, Virtual Front Panel, which allows you to use a computer to...
    • The RS-232, AE Bus Host port is a 9-pin, female, shielded, subminiature-D connector.
      • Figure 4-4. RS-232, AE Bus Host port connector
    • The signals available at the RS-232, AE Bus Host port conform to the RS-232 interface standards. ...
    • To Connect the Computer to the Apex unit:
    • Use a standard RS-232 cable that is no longer than 50 feet in length. This cable has a 9-pin, shi...
    • Table 4-4. RS-232, AE Bus Host Port Pin Descriptions
    • 1
      • Reserved for future use
    • 2
      • RS-232 transmit data
    • 3
      • RS-232 receive data
    • 4
      • Reserved for future use
    • 5
      • Data Common
    • 6
      • Reserved for future use
    • 7
      • Reserved for future use
    • 8
      • Reserved for future use
    • 9
      • Reserved for future use
      • RS-232, AE Bus Host Port Cabling Requirements
        • The cabling requirements for the RS-232 and AE Bus requires a standard DB-9 male to female extens...
      • Communicating Through the RS-232, AE Bus Host Port
        • The communications capability of the serial AE Bus Host port is limited to the following parameters:
        • The time-out period for the Apex generator is factory set at 0.02 s (that is, no more than 0.02 s...
        • The host computer must finish one transaction with the Apex generator before it initiates another...
      • AE Bus Protocol
        • The AE Bus protocol uses pure binary data (nothing is coded in ASCII) and is designed to facilita...
        • The AE Bus message packet combines chunks of information in such a way that groups of information...
        • Figure 4-5. shows the organization of these data fields in the AE Bus message packet. The subsequ...
          • Figure 4-5. Graphic representation of a RS-232, AE Bus message packet
      • Header
        • The first byte in each packet contains two pieces of information: five bits contain the packet ad...
        • The remaining three bits (bits 0, 1, and 2) tell the receiving unit how long the Data field is so...
      • Command
        • This field contains a one-byte value: 00h to FFh (0 to 255). If the message packet originates wit...
      • Optional Length Byte
        • This field supplements the Header field and exists only when the length bits in the Header field ...
      • Data (Data Bytes)
        • The Data field can contain from 0 to 255 bytes of binary data, which are interpreted in various w...
        • If the value specified in the length bits of the Header field is 0 to 6, the Apex generator expec...
      • Checksum
        • This one-byte field is the last one in the packet. The content depends on the value of each of th...
        • Only after the checksum of a message packet is validated (having no parity errors, and the addres...
      • Creating an Ideal Communications Transaction
        • Figure 4-6. is a simplified graphic showing the steps in an ideal communications transaction betw...
        • Host
          • Figure 4-6. AE Bus communications transaction
        • First, the host computer sends a message packet to the Apex generator. The packet contains one of...
        • Once the Apex generator receives the message packet, the Apex generator verifies that the message...
        • If the address does not match, the Apex generator does not respond to the host; the Apex generato...
        • If the Apex generator receives a request for data or status information, it gathers and sends the...
        • If the host receives a NAK from the Apex generator, the host either retransmits the packet or doe...
        • Meanwhile, the Apex generator has prepared a message packet with the requested information or app...
        • If the Apex generator receives an ACK, it returns to the normal waiting state. If the Apex genera...
      • Host/Apex Communications Transaction Example
        • Figure 4-7 is a simplified graphic showing the steps in an example communications transaction bet...
          • Figure 4-7. AE Bus communications transaction example
      • Command Status Response (CSR) Codes—RS-232, AE Bus Host
        • When the host sends an executable command or a command requesting a change in a parameter setting...
        • Table 4-5. CSR Codes for RS-232, AE Bus Host
    • 0
      • Command accepted
    • 1
      • Wrong control mode
    • 2
      • Output is on
    • 3
      • Output is off
    • 4
      • Data is out of range
    • 5
      • User off active
    • 7
      • Active fault(s) exist
    • 9
      • Data byte count is incorrect
    • 14
      • CMD not accept
    • 16
      • T life
    • 19
      • Recipe active
    • 30
      • EPROM read/write
    • 50
      • Frequency out of range
    • 51
      • Duty cycle out of range
    • 52
      • Minimum on/off time violated (on/off time must be ³ 10µs).
    • 99
      • Command not implemented
      • Command Set for the RS-232, AE Bus Host Port
        • Table 4-6 lists the command set for the RS-232, AE Bus Host port.
        • Table 4-6. Host Port Commands for RS-232 with AE Bus 
        • Requests RF output off; request is always honored regardless of which interface has control. (Rea...
    • 0
    • 1
      • Requests RF output on; host control must have been selected.
    • 0
    • 1
      • Sets the method of output regulation (forward power (6), load (7), and ext. (8)). (Readback comma...
    • 1 data byte 8-bit value
    • 1
      • Specifies maximum forward power that can be delivered; accepts a value of 0 to 8000 W (for the 8 ...
    • 2 data bytes 16-bit value
    • 1
      • Specifies maximum reflected power that can be tolerated; accepts a value of 0 to 2000 W. (Readbac...
    • 2 data bytes 16-bit value
    • 1
      • Specifies the maximum external feedback level; accepts a value from 0 to the maximum external fee...
    • 2 data bytes 16-bit value
    • 1
      • Specifies the output setpoint level for whatever method of output regulation has been selected. A...
    • 2 data bytes 16-bit value
    • 1
      • Specifies the external feedback value that corresponds to 10 V on the User port; requires data by...
    • 3 data bytes 16-bit value 8-bit value
      • Specifies which target is active; accepts a value of 1 to 4. (Readback command is 156.)
    • 1 data byte 8-bit value
    • 1
      • Sets the life (in kWh) of the target you specify. Requires five data bytes arranged as follows:
      • (Readback command is 157.)
    • 5 data bytes 8-bit value 32-bit value
    • 1
      • Sets the active control mode of the generator; possible choices are: 2 = host, 4 = User port (ana...
    • 1 data byte 8-bit value
    • 1
      • Specifies how long the generator can produce output that is not equal to the programmed setpoint ...
    • 2 data bytes 16-bit value
    • 1
      • Specifies a percentage that the generator can be out of setpoint before it starts the out-of- set...
    • 1 data byte 8-bit value
    • 1
      • Specifies the number of recipe steps. Send 1 data byte that indicates the number of recipe steps ...
    • 1 data byte 8-bit value
      • Specifies setpoint for a recipe step. Send 3 data bytes.
      • • byte 1 = recipe step number (can be 1 through 7)
      • • bytes 2 and 3 = setpoint value (send least significant byte first); the value must be within th...
    • 3 data bytes 8-bit value 16-bit value
      • Sets the run time for the specified recipe step. Send 3 data bytes.
      • • byte 1 = recipe step number (1 through 7)
      • • bytes 2 and 3 = run time in hundredths of seconds or in joules (if the recipe is set for joules...
    • 3 data bytes 8-bit value 16-bit value
      • Sets the recipe for time or joules mode. Send one data byte indicating the recipe type:
    • 1 data byte 8-bit value
      • Sets the Host port timeout value. Accepts a value of 2 to 500, representing 0.02 to 5.0 s. (Readb...
    • 2 data bytes 16-bit value
    • 1
      • Sets the serial port address and baud rate. Send 3 data bytes:
      • • byte 1:
        • bits 0 through 4 set serial port address (addresses 1 through 31 are supported)
        • bits 5 and 6 are unused
        • bit 7 selects communication protocol (0=RS-232, 1=RS-485)
      • • Bytes 2 and 3 = baud rate (send least significant byte first)
        • Valid baud rates depend on the communication protocol selected in byte 1:
        • For RS-232, send 1200, 4800, 9600, or 19200
        • For RS-485, send 9600, 19200, 38400, or 57600
        • Read back with CMD 212.
    • 3 data bytes 8-bit value 16-bit value
      • Sets the pin diode 1 latch. Send 1 data byte.
      • • byte 1 = latch
    • 1 data byte 8-bit value
      • Sets the RF pulsing frequency in Hz. Accepts a value of 150 to 50000. Read back with command 193.
    • 4 data bytes 32-bit value
    • 1
      • Sets the RF pulsing duty ON time in increments of 1%. This value can range from 10% to 90%. Minim...
    • 2 data bytes
      • Clears profibus fault and error code register
      • Requests the generator type; returns 4 ASCII characters.
    • 0
    • 4 data bytes 4 ASCII characters
      • Requests the output capacity of the generator; returning packet contains 4 ASCII characters.
    • 0
    • 4 data bytes 4 ASCII characters
      • Requests the version number of the mainframe software. The returning packet contains 7 ASCII char...
    • 0
    • 7 data bytes 7 ASCII characters
      • Requests the serial Host port time-out value (002 to 500 representing 0.02 to 5.00 s).
    • 0
    • 2 data bytes 16-bit value
      • Requests regulation mode (set with CMD 3). Returning values:
      • • 6 = Forward
      • • 7 = Delivered or Load
      • • 8 = External (DC Bias)
    • 1 data byte 8-bit value
      • Requests control mode (set by CMD 14). Returning values: 2 = host, 4 = analog
    • 0
    • 1 data byte 8-bit value
      • Requests the number of the active target (set by CMD 11)
    • 0
    • 1 data byte 8-bit value
      • Requests the amount of life remaining in the target you specify (set by CMD 12). This command req...
    • 1 data byte 8-bit value
    • 4 data bytes 32-bit value
      • Requests report on process status; returning packet contains the following bytes arranged as foll...
      • 1st status byte:
      • 2nd status byte:
      • 3rd status byte—fault flags
      • 4th status byte—fault flags
    • 0
    • 4 data bytes 4—8-bit values
      • Requests output setpoint level (set by CMD 8) and whatever method of output regulation has been s...
    • 0
    • 3 data bytes 16-bit value 8-bit value
      • Requests a snapshot of forward power level at that instant. Regular units report in units of watt...
    • 0
    • 2 data bytes 16-bit value
      • Requests a snapshot of reflected power level at that instant. Regular units report in units of wa...
    • 0
    • 2 data bytes 16-bit value
      • Requests a snapshot of load power level at that instant
    • 0
    • 2 data bytes 16-bit value
      • Requests a snapshot of external feedback level at that instant. Data bytes 1 and 2 represent Exte...
    • 0
    • 2 data bytes 16-bit value
      • Requests programmed limit for forward power (set by CMD 4).
    • 2 data bytes 16-bit value
      • Requests reflected power limit (set by CMD5).
    • 2 data bytes 16-bit value
      • Requests external feedback limit (set by CMD6)
    • 2 data bytes 16-bit value
      • Reports dissipated power
    • 2 data bytes 16-bit value
      • Requests how long the generator is programmed to produce output that is not equal to the programm...
    • 2 data bytes 16-bit value
      • Requests what percentage the generator can be out of setpoint before it starts the out-of- setpoi...
      • Reports the allowable setpoint deviation
    • 1 data byte 8-bit value
      • Reports the setpoints and run times for each recipe step. The number of data bytes returned depen...
    • Varies; sends 4 data bytes for each recipe step
      • Reports the number of steps in the recipe, the status of the most recent recipe run, and the reci...
      • • Byte 1 = number of recipe steps
      • • Byte 2 = recipe status:
      • • Byte 3 = recipe mode (1 = time, 2 = joule)
        • Requests the RF pulsing frequency in Hz (set with CMD 93).
    • 4 data bytes 32-bit value
      • Requests the duty cycle in% ON time
    • 2 data bytes 16-bit value
      • Requests the revision level of the mainframe software. The returning packet contains three ASCII ...
    • 3 data bytes 3 ASCII characters
      • Reports a count of unit on events
    • 4 data bytes 32-bit value
      • Reports a count of output on events
    • 4 data bytes 32-bit value
      • Reports a count of overtemp events
    • 4 bytes 32 bit value
      • Requests the amount of time (in seconds) that the generator was producing output.
    • 4 data bytes 32-bit value
      • Requests the total amount of energy (in kWh) delivered by the generator.
    • 4 data bytes 32-bit value
      • Returns faults, warnings, and shutdowns
    • 1 data byte 8-bit value
      • Returns the serial port 0 address and baud rate (set with CMD 69).
      • • byte 1:
        • bits 0 through 4 = serial port address (addresses 1 through 31 are supported)
        • bits 5 and 6 = unused
        • bit 7 = communication protocol (0=RS-232, 1=RS-485)
      • • Bytes 2 and 3 = baud rate
    • 3 data bytes 8-bit value 16-bit value
      • Returns the condensed snapshot of generator data
      • • 0,1: Forward Power with Bias Correction
      • • 2,3: Reflected Power with Bias Correction
      • • 4,5: Delivered Power with Bias Correction
      • • 6,7 User Setpoint
      • • 8: Regulation Mode (see command 3 for definition)
      • • 9 to 12: Process Status (see command 162 for definition)
      • • 13,14: Cold Plate Temperature (see command 228 for definition)
      • • 15,16: DC Voltage
      • • 17,18: DC current
      • • 19 to 22: Unused
        • APEX with VI Measurement data point definitions:
      • • 0,1: Real Power with Bias Correction
      • • 2,3: Imaginary Power with Bias Correction’
      • • 4,5:VSQ with Bias Correction
      • • 6,7: User Setpoint
      • • 8: Regulation Mode (see command 3 for definition)
      • • 9 to 12: Process Status (see command 162 for definition)
      • • 13,14: Cold Plate Temperature (see command 228 for definition)
      • • 15,16: DC Voltage
      • • 17,18: DC Current
      • • 19,20: Real Impedance
      • • 21,22: Imaginary Impedance
        • Returns a string that represents the AE product identification number (PIN). The actual PIN lengt...
        • Retrieves the error code
    • 1 data byte 8-bit value
  • Host Port—Profibus
    • This section describes the Profibus Host port interface. To determine if your Apex unit has this ...
      • This section of the manual provides information for the: Profibus Host port option PIN position 6...
    • AE Profibus Protocol
      • Profibus (Process Field Bus) is an interface that lets you communicate with your Apex generator f...
      • The Profibus Host port on the generator is a 9-pin, female, subminiature-D connector and an eight...
        • Figure 4-8. Host port connector with Profibus
      • Table 4-7 describes the Profibus Host port pins.
      • Table 4-7. Profibus Host Port Pins
    • 1
    • UNASSIGNED
    • 2
    • UNASSIGNED
    • 3
    • A
      • Data bus A
    • 4
    • UNASSIGNED
    • 5
    • ISOLATED GND
      • Isolated ground
    • 6
    • ISOLATED +5 V
      • Isolated +5 V
    • 7
    • UNASSIGNED
    • 8
    • B
      • Data bus B
    • 9
    • UNASSIGNED
      • Profibus Type Files (GSD Files)
        • Type files are computer files that some Programmable Logic Controllers (PLCs) use to compile thei...
        • For older Siemens Profibus PLCs, the “type file” is proprietary to Siemens Energy & Automation (S...
        • Type files are available on SE&A’s electronic Bulletin Board Services (BBS). You can download the...
        • You can download type files from a World Wide Web site maintained by the Profibus Trade Organizat...
      • Setting the Network Address with the Profibus DIP Switch
        • Use the DIP switch next to the Profibus port on the rear panel to set the Apex generator's addres...
        • To enter the unit's address, set the switch positions for binary representation, starting with th...
        • Placing a switch in the “up” position (toward the number) is the same as indicating “1” binary. T...
      • Profibus Termination
        • Please ensure that you follow proper termination procedures if your Apex is the last slave on the...
      • Profibus Baud Rate
        • The auto-baud feature of AE’s certified Profibus interface adjusts automatically to the rate of t...
      • Profibus Master Reset Command
        • Send the master reset command, Command 119, when the Apex supply has experienced a non-recoverabl...
      • Profibus Watch Dog Timer
        • As a safety feature, the Profibus maintains a watch dog timer that shuts off the Apex supply’s ou...
        • If your Profibus system does not calculate the watch dog timer value for you or if you want to mo...
      • Profibus-Specific Errors
        • In the event of a Profibus error, the Apex generator turns output power off and sets the Profibus...
      • Profibus Data Consistency
        • Some PLCs using Profibus interfaces have a problem with data consistency. (We define “data consis...
        • The root of the problem is a shared memory block. Most PLCs share a memory block with the Profibu...
        • You can create a “work around” to this problem with a command sequence. (For more information abo...
          • 1. Send the null command (Command 0). The Apex generator ignores this command.
          • 2. Update the download packet with data for the desired command.
          • 3. Update the packet with the desired command.
          • 4. Send the download packet.
          • 5. Repeat step 1, and continue as needed.
        • By creating a procedure like this one, you can ensure the data for a command will not be changed ...
      • Profibus/Apex Software Commands
        • The new AE Profibus is command-based. We define a download packet (“outbytes”) and an upload pack...
      • Profibus Download Packet
        • The download packet for the AE Profibus contains four bytes, as the following table shows.
        • Table 4-8. Configuration of Download Bytes (Outbytes)
    • 0
      • Command
    • 1
      • Data byte (LSB)
    • 2
      • Data byte
    • 3
      • Data byte (MSB)
      • In the packet, bytes 1, 2, and 3 comprise the “data field” and contain information defined by the...
      • Profibus Upload Packet
        • During every Profibus data exchange, the Apex generator supplies a 14-byte response to a download...
        • Table 4-9. Configuration of Profibus Upload Packet (Inbytes)
    • 0
      • Status flags—first byte
    • 1
      • Status flags—second byte
    • 2
      • Delivered power low
    • 3
      • Delivered power high
    • 4
      • Forward power low
    • 5
      • Forward power high
    • 6
      • Reflected power low
    • 7
      • Reflected power high
    • 8
      • Data byte (LSB)
    • 9
      • Data byte
    • 10
      • Data byte
    • 11
      • Data byte
    • 12
      • Data byte (MSB)
    • 13
      • Data field definition
      • Bytes 0 and 1 of the upload packet contain information about the Apex generator; this information...
      • Table 4-10. Upload Status Bytes
      • First Status Bit
      • Second Status Bit
      • In the first status byte, bit 13 (the active toggle bit) indicates, the status of the Profibus in...
      • In the packet, bytes 8, 9, 10, 11, and 12 comprise the “data field” and contain information defin...
      • Profibus Command Set
        • Table 4-11 lists the command set for the Profibus Host port.
        • Table 4-11. Profibus Host Port Commands
    • 1 RF off
      • Requests RF output off; request is always honored regardless of which interface has control. (Rea...
    • 0
    • 2 RF on
      • Requests RF output on; host control must have been selected.
    • 0
    • 3 regulation select
      • Sets the method of output regulation (forward power—6, load—7, and ext—8). (Readback command is 1...
    • 1 data byte 8-bit value
    • 4 fwd pwr limit
      • Specifies maximum forward power that can be delivered; accepts a value of 0 to 8000 W (for the 8 ...
    • 2 data bytes 16-bit value
    • 5 refl pwr limit
      • Specifies maximum reflected power that can be tolerated; accepts a value of 0 to 20% of full rate...
    • 2 data bytes 16-bit value
    • 6 ext feedback limit
      • Specifies the maximum external feedback level; accepts a value from 0 to the maximum external fee...
      • This command sets the value at which the setpoint is limited during external regulation
    • 2 data bytes 16-bit value
    • 8 setpoint
      • Specifies the output setpoint level for whatever method of output regulation has been selected. A...
    • 2 data bytes 16-bit value
    • 9 max ext feedback
      • Specifies the external feedback value that corresponds to 10 V on the User2 port; requires data b...
      • Second/third byte = a 16-bit value in the range of 500 to 5000.
      • Fourth byte = the number of decimal places (0 to 4) used to display the external feedback signal ...
    • 3 data bytes 16-bit value 8-bit value
    • 11 select active target
      • Specifies which target is active; accepts a value of 1 to 4. (Readback command is 156.)
    • 1 data byte 8-bit value
    • 12 set target life
      • Sets the life (in kWh) of the active target. Requires three data bytes (24-bit value):
      • Second, third, and fourth bytes = target life in kWh.
      • Two decimals are implied—to get 1 kWh, send a value of 100.
      • (Readback command is 157.)
    • 3 data bytes 24-bit value
    • 14 control transfer
      • Sets the active control mode of the generator; possible choices are: 2 = host, 4 = User port (ana...
    • 1 data byte 8-bit value
    • 15 out-of- setpoint timer
      • Specifies how long the generator can produce output that is not equal to the programmed setpoint ...
    • 2 data bytes 16-bit value
    • 16 allowable deviation
      • Specifies a percentage that the generator can be out of setpoint before it starts the out-of- set...
    • 1 data byte 8-bit value
    • 128 supply type
      • Requests the generator type; returns 4 ASCII characters.
    • 0
    • 4 data bytes 4 ASCII characters
    • 129 supply size
      • Requests the output capacity of the generator; returning packet contains 4 ASCII characters.
    • 0
    • 4 data bytes 4 ASCII characters
    • 130 read mainframe software version number
      • Requests the version number of the mainframe software. The returning packet contains 5 ASCII char...
    • 0
    • 5 data byte 5 ASCII characters
    • 155 read control method
      • Requests control mode (set by CMD 14). Returning values: 2 = host, 4 = analog.
    • 0
    • 1 data byte 8-bit value
    • 156 read active target
      • Requests the number of the active target (set by CMD 11).
    • 0
    • 1 data byte 8-bit value
    • 157 read target life
      • Requests the amount of life remaining (set by CMD 12) in the active target you specify. Two decim...
    • 1
    • 4 data bytes 32-bit value
    • 162 read process status
      • Requests report on process status; returning packet contains the following bytes arranged as foll...
      • 1st status byte:
      • 2nd status byte:
      • 3rd status byte—fault flags:
      • 4th status byte—fault flags:
    • 4 data bytes four 8-bit values
    • 164 read setpoint/ regulation mode
      • Requests output setpoint level (set by CMD 8) and whatever method of output regulation has been s...
      • First and second bytes = setpoint value.
      • Third byte = method of output regulation.
    • 0
    • 3 data bytes 16-bit value 8-bit value
    • 165 read forward power
      • Requests a snapshot of forward power level at that instant.
    • 0
    • 2 data bytes 16-bit value
    • 166 read reflected power
      • Requests a snapshot of reflected power level at that instant.
    • 0
    • 2 data bytes 16-bit value
    • 167 read delivered power
      • Requests a snapshot of load power level at that instant.
    • 0
    • 2 data bytes 16-bit value
    • 168 read ext feedback (dc bias)
      • Requests a snapshot of external feedback level at that instant.
    • 0
    • 2 data bytes 16-bit value
    • 169 read fwd pwr limit
      • Requests programmed limit for forward power (set by CMD 4).
    • 0
    • 2 data bytes 16-bit value
    • 170 read refl pwr limit
      • Requests reflected power limit (set by CMD5).
    • 0
    • 2 data bytes 16-bit value
    • 171 read ext feedback limit
      • Requests external feedback limit (set by CMD6).
    • 0
    • 2 data bytes 16-bit value
    • 184 read out-of- setpoint interval
      • Requests how long the generator is programmed to produce output that is not equal to the programm...
    • 0
    • 2 data bytes 16-bit value
    • 185 read allowable deviation
      • Requests what percentage the generator can be out of setpoint before it starts the out-of- setpoi...
    • 0
    • 1 data bytes 8-bit value
    • 198 read mainframe software revision level
      • Requests the revision level of the mainframe software. The returning packet contains three ASCII ...
    • 0
    • 3 data bytes 3 ASCII characters
    • 205 read run time
      • Requests the amount of time (in seconds) that the generator was producing output.
    • 0
    • 4 data bytes 32-bit value
    • 206 read total energy output
      • Requests the total amount of energy (in kWh) delivered by the generator.
    • 0
    • 4 data bytes 32-bit value
  • Host Port—DeviceNet
    • This section describes the DeviceNet Host port interface. To determine if your Apex unit has this...
      • This section of the manual provides information for the: DeviceNet option PIN position 6, (A 1 2 ...
    • The DeviceNet connector is either a 5-pin, male, Lumberg, RSF 5/0.5m or Turck FS 4.5.
      • Figure 4-9. DeviceNet connector
    • Table 4-12 describes the DeviceNet port pin signals.
    • Table 4-12. Host Port DeviceNet Pins
    • 1
      • DRAIN
      • Shield
    • 2
      • V+
      • DeviceNet supply
    • 3
      • V-
      • DeviceNet supply
    • 4
      • CAN_H
      • DeviceNet data transmit/ receive
    • 5
      • CAN_L
      • DeviceNet data transmit/ receive
      • Analog inputs and outputs use the values and equations listed in Table 4-13 to define the voltage...
      • Table 4-13. DeviceNet Voltage Ranges
    • 0
    • 0.000 V
      • DeviceNet Interface Characteristics
        • The device uses rotary switches to set the MAC ID. This allows you to visually verify the MAC ID ...
        • The device is delivered with the baud rate set to 500 KBd which does not change if the device is ...
        • The device supports the DeviceNet Duplicate MAC ID Check protocol.
        • The device uses DeviceNet’s Group 2 I/O Poll Command message (and the associated Group 1 I/O Poll...
        • Analog outputs automatically set the output voltages to 0 V if too much time elapses after the la...
      • DeviceNet Rotary Switches: Baud Rate and Addressing
        • The DeviceNet interface features three rotary switches, located on the rear, which are read each ...
        • The signals available at the RS-232, AE Bus Host port conform to the RS-232 interface standards. ...
          • Figure 4-10. DeviceNet control panel
        • Use the MSD and LSD switches to select the unit’s address (MAC ID). MAC IDs 0 through 63 are vali...
      • DeviceNet Control Panel LEDs
        • The rear panel of the Apex generator features two, bi-color LEDs (see Figure 4-20). One is labele...
      • Devicenet Module Status LED
        • The MOD bi-color (amber/green) LED provides device status. It indicates whether the device has po...
        • .
        • Table 4-14. MOD Status LED
        • Off
        • No power
        • the unit is not receiving power.
        • Green (steady)
        • Operational
        • the unit is operating normally.
        • Flashing Green
        • Standby
        • the unit needs maintenance because the configuration is missing, incomplete, or incorrect.
        • Amber
        • Unrecoverable Fault
        • the unit has experienced a fault from which it cannot recover; you may need to replace the unit.
        • Flashing Amber/Green
        • Device Self-Testing
        • the unit is running self diagnostics
      • Devicenet Network Status LED
        • The NET bi-color (amber/green) LED indicates the status of the communication link. The following ...
        • Table 4-15. Network Status LED
        • Off
        • No power
        • The unit is not on-line because:
        • • it has not completed the Dup_MAC_ID test yet
        • • it is not receiving power (check the MOD LED).
          • Green (steady)
          • Link okay
          • The unit is on-line and allocated to the master
          • Flashing green
          • On-line, not connected
          • The unit is on-line but has no connections in its existing state because:
        • • the unit has no established connections to other nodes
        • • the unit is not allocated to the master.
          • Flashing amber
          • Connection time-out, critical link failure
          • One or more I/O connections are in the timed-out state.
          • Amber
          • Critical link failure
          • Communication has failed; that is, the unit has detected an error that has made it incapable of c...
          • For information about Module Status LED indications during power-up, refer to Section 8.2.4 of th...
      • DeviceNet Operation
        • You may operate your Apex generator either solely through the User port or through the optional D...
        • Before operating your Apex generator through the DeviceNet port, ensure that your network is conn...
        • DeviceNet is connected through pins 1, 10, 13, 14, and 15 of the User port (See table 4-1).
        • When the generator powers up, it defaults to user control mode. However, engaging DeviceNet autom...
        • Before operating your Apex generator through the DeviceNet port, ensure that your network is conn...
      • DeviceNet Poll Command Message
        • Note that this device uses DeviceNet’s Group 2 I/O Poll Command message (and the associated Group...
        • Table 4-16. Poll Command Message
    • 0
    • Power Output Setpoint AI (LSB)
    • 1
    • 0
    • 0
    • 0
    • 0
    • Power Output Setpoint AI (MSB)
    • 2
    • 0
    • 0
    • 0
    • 0
    • 0
    • 0
    • 0
    • 0
    • 3
    • 0
    • 0
    • 0
    • 0
    • 0
    • 0
    • 0
    • 0
    • 4
    • PO
      • Power Output Setpoint 0 to 10 V; 10 V = full output power of the power supply
        • PO = Power On 1 = turns power supply’s output ON 0 = turns power supply OFF
      • DeviceNet Response Message
        • Table 4-17 represents the structure of the response message.
        • Table 4-17. Response Message
    • 0
    • Forward Power Sense AI (LSB)
    • 1
    • 0
    • 0
    • 0
    • 0
    • Forward Power Sense AO (MSB)
    • 2
    • Reflected Power Sense A1 (LSB)
    • 3
    • 0
    • 0
    • 0
    • 0
    • Reflected Power Sense AI (MSB)
    • 4
    • Not Used AI (LSB)
    • 5
    • 0
    • 0
    • 0
    • 0
    • Not Used AI (MSB)
    • 6
    • Not Used AI (LSB)
    • 7
    • 0
    • 0
    • 0
    • 0
    • Not Used AI (MSB)
    • 8
    • INTS
    • TS
    • SPS
    • POS
      • Forward Power Sense 0 to 10 V; 10 V = maximum rated power linear Reflected Power Sense 0 to 10 V;...
  • Apex Status Indicators (LEDs)
    • Some Apex generators provide the following status indicators on the front or rear panel. For pane...
      • This section of the manual provides information for the: Passive digital display option PIN posit...
    • Table 4-18. LED Status Indicators
    • AC ON
    • This green LED indicates that ac power is available within the generator and all three phases are...
    • RF ON
    • This green LED indicates that RF power is on (enabled). Depending on the selected setpoint value,...
    • A flashing LED indicates an error. See “Troubleshooting guide” on page61.
    • INTERLOCK
    • When lit this green LED indicates that the required interlock criteria has been satisfied. The in...
    • POWER LIMIT
    • When lit, this yellow LED indicates that the generator is unable to supply the requested power le...
    • OVERTEMP
    • A flashing yellow LED warns that the internal cold plate temperature is approaching the shutdown ...
    • A continuously lit LED indicates that the internal cold plate temperature has exceeded the allowa...
    • ALARM
    • This yellow LED indicates that the generator has turned off RF output due to some limit or alarm ...
    • In the event of an alarm condition, after correcting the fault condition, an RF OFF signal has to...
  • Apex Panel Illustrations
    • The appearance of the front and real panels of the Apex generator is highly variable due to the n...
      • Figure 4-11. Front Panel
      • Figure 4-12. Rear panel
• Installation, Setup, and Operation
  • This chapter guides you through the process of installing, setting up, and operating an Apex gene...
  • Because Apex generators are equipped with varying options, not all of the information in this cha...
  • Installing the Generator
    • The following sections provide information to help you install the Apex generator.
  • Unpacking
    • Unpack and inspect the generator carefully. Check for obvious physical damage. If no damage is ap...
  • Grounding
    • The unit provides two threaded grounding holes (one is a metric A-6, the other is a 5/16² x 18 US...
  • Spacing Requirements
    • The following diagram illustrates the spacing requirements in the installation of an Apex unit.
      • Figure 5-1. Apex dimensions
  • Mounting the Generator
    • Refer to Figure 5-1 for dimensions used to properly mount the Apex generator.
  • Connecting Cooling Water
    • This generator is water cooled. Do not operate it until water is connected and the cooling requir...
    • Apex water fittings vary depending on the option installed on the generator. Water fittings are i...
    • To Connect Cooling Water:
      • 1. Connect the input and output water connections and tighten securely.
      • 2. Turn on the water and ensure that there are no leaks.
      • 3. Be sure that the flow rate, pressure, and temperature are within the minimum specifications re...
  • Installing the Optional Water Control
    • The water control connector is a 2-pin, miniature, power jack, Switchcraft p/n L712A. Table 5-1 a...
      • Figure 5-2. Water control connector
      • Figure 5-3. Optional water solenoid connector
    • Table 5-1. Water Control Connector Pins
    • 1 (center pin)
    • +24 V/1A (switched source to enable solenoid)
    • 2 (outer pin)
    • +24 V return
  • Connecting Output Power
    • Apex output connectors vary depending on the option installed on the generator. The output connec...
    • There are five output connector options:
    • Figure 5-4 provides a basic drawing of the output connectors.
      • Figure 5-4. Output connector
    • For all the output connectors, the center pin provides the RF output connection, while the outer ...
  • Connecting Input Power
    • Apex input power connectors vary depending on the option installed on the generator. The output c...
    • ODU Connector
      • The following section describes the ODU input connector. To determine if your Apex unit has this ...
        • This section of the manual provides information for the: ODU input connector PIN position13, (A 1...
      • Figure 5-5 shows the ODU input connector. The pin numbers are labeled in the illustration.
        • Figure 5-5. ODU input connector
      • Table 5-2 provides pin descriptions for the ODU input connector.
      • Table 5-2. ODU Pin Descriptions
      • 1
      • Phase
      • 2
      • Phase
      • 3
      • Phase
      • 4
      • No connection
      • 5 or Ground
      • Ground
    • NonTerminated, four-Conductor Pigtail
      • The following section describes the nonterminated, four-conductor pigtail input options. To deter...
        • This section of the manual provides information for the: Nonterminated, four-conductor pigtail in...
      • Table 5-3 provides pin descriptions for the nonterminated, four-conductor input options.
      • Table 5-3. Nonterminated, Four-Conductor Pin Descriptions
      • 1
      • Phase (black)
      • 2
      • Phase (black)
      • 3
      • Phase (black)
      • Ground
      • Green or Green/yellow stripe
    • Harting Type Han-Q Connector
      • The following section describes the Harting Type Han-Q input connector. To determine if your Apex...
        • This section of the manual provides information for the: Harting Type Han-Q input connector PIN p...
      • Figure 5-6 shows the Harting Type Han-Q input connector.
        • Figure 5-6. Harting type Han-Q connector
      • Table 5-4 provides pin descriptions for the Harting input connector.
      • Table 5-4. Harting Type Han-Q Pin Descriptions
      • 1
      • Phase
      • 2
      • Phase
      • 3
      • Phase
      • 4
      • No connection
      • 5
      • EMI shield ground
      • Gnd
      • Safety earth ground
  • Connecting I/O and Auxiliary Connectors
    • The I/O and auxiliary connections that you make will depend on the options installed in your Apex...
    • To Control the Generator Through a User Port
      • Apex User port options are identified by PIN position 8, and they are discussed individually in “...
      • To connect to the User port, install the appropriate I/O cable (cable requirements are identified...
    • To Control the Generator through a Host port
      • Apex Host port options are identified by PIN position 6, and they are discussed individually in “...
        • 1. Ensure that the required User port inputs are satisfied. The required User port inputs are ide...
        • 2. Connect and secure the appropriate serial cable to the Apex unit and the host (cable requireme...
    • To Use the Common Exciter (CEX) Feature (optional)
      • In the common exciter (CEX) mode of operation, more than one Apex generator is coupled into the s...
      • When operating in CEX mode, one Apex unit is the “master” and the other is the “slave.” The CEX o...
      • More than two slave generators can be locked together to a single master unit by “daisy chaining”...
      • The phase relationship between the RF is fixed by the length of the cable used to interconnect th...
  • First Time Operation
    • The first time you operate the Apex generator do the following.
      • 1. Use the preceding installation instructions to install the generator.
      • 2. Turn on the system circuit breakers and apply ac input to the unit.
      • 3. When the generator received ac input, it performs self-diagnostics. If the POWER LIMIT LED fla...
      • 4. Verify that the AC ON LED is lit. If it isn’t lit, see “Troubleshooting guide” on page61.
      • 5. Verify that the Alarm LED is not lit. If it is lit, see “Troubleshooting guide” on page61.
      • 6. Verify that the Interlock LED is lit. If it is not lit, See “Troubleshooting guide” on page61.
      • 7. Send RF On command and verify that the RF ON LED is on. If it is flashing or is not lit, see “...
      • 8. Request a setpoint and verify that the Power Limit LED is not lit. If it is lit, see “Troubles...
      • 9. If the Apex unit is delivering power and the power limit LED is not lit, the unit is functioni...
  • Normal Operation
    • Each time the generator is powered on, the self-diagnostics procedure is done to ensure the gener...
    • Specific operating techniques vary depending on the control and monitoring interface. If you are ...
  • Understanding and Setting Up Pulsing Output
    • As of January 2001, only the AEBus Host Port (PIN 6 option 0) supports pulsing. Add info about co...
    • Some Apex units have a pulsing option, which allows you to produce either pulsed RF output or sta...
      • This section of the manual provides information for the: Pulsing option PIN position 14, (A 1 2 3...
    • For units that have the pulsing option, pulsing output can be enabled or disabled. All pulsing se...
  • Understanding Pulsing
    • When pulsing is enabled, the Apex generates pulses of RF output based on frequency and duty-cycle...
  • Enabling and Setting Pulsing
    • To enable pulsing, send a valid set of frequency and duty cycle settings to the Apex generator (s...
    • Pulsing settings are not saved when the Apex unit is turned off. To return pulsing settings to de...
• Troubleshooting and Customer Support
  • This Chapter addresses the troubleshooting of the Apex unit. It can be used best by knowing what ...
  • • “Troubleshooting Questions” on page63: This section contains questions that can be easily ans...
  • • “Troubleshooting Procedures” on page64: This section explains the procedures needed to get yo...
  • • “AC On LED not Lit” on page64: This section contains a full list of codes and how they can be...
  • • “AE Customer Support” on page611: This section provides phone numbers and addresses for AE su...
  • Troubleshooting guide
    • Before calling AE Customer Support, perform the following steps or procedures. Use this section i...
  • Checks with the Power Off
    • Before troubleshooting the Apex unit make sure the following are completed:
      • 1. Ensure the power to the unit is off.
      • 2. Check for visible damage to the unit, cables, and connectors.
      • 3. Ensure all unit connectors are installed correctly and are fastened tightly.
      • 4. Check to determine whether any system-related circuit breakers have been tripped.
      • 5. Ensure there is input power to the unit, and ensure the input power meets specifications.
      • 6. Ensure ground connections are adequate and secure.
  • Troubleshooting Questions
    • This section lists the steps necessary to get the unit on. Before working through the following q...
    • Use the following troubleshooting questions to troubleshoot the Apex generator.
      • 1. Is the AC On LED lit?
      • 2. Is the Alarm LED lit?
      • 3. Is the Overtemp LED flashing?
      • 4. Is the Interlock LED lit?
      • 5. Is the RF ON LED flashing?
      • 6. Is RF ON LED lit?
      • 7. Is the Power Limit LED lit?
  • Troubleshooting Procedures
    • The following section describes the procedures involved in troubleshooting. Use this section to h...
  • AC On LED not Lit
    • When the AC On LED is not lit, see Electrical Specifications on page35. There also may be an ex...
  • Alarm LED Lit
    • When Alarm LED is lit, this means a error has been detected. This is be caused by a fault which c...
  • Overtemp LED on Solid
    • When the Overtemp LED is on solid, the internal cold plate temperature has exceeded the allowable...
    • To avoid this condition, make sure the unit is receiving proper cooling as outlined in the Coolan...
  • Overtemp LED is Flashing
    • When flashing, this indicator shows that the internal cold plate temperature is approaching the s...
    • Take precautions by ensuring that the unit receiving proper cooling as outlined in the Coolant Sp...
  • Interlock LED is not Lit
    • When the AC On LED is lit and the Interlock LED is not lit, either the interlock is not satisfied...
    • To satisfy the interlock, make sure the RF output cover is firmly attached and ensure the interlo...
  • RF ON LED Flashing
    • The RF On LED will flash under the following conditions:
  • Power Limit LED is Lit
    • When lit, the power limit LED indicates that the generator is unable to supply the requested powe...
    • To troubleshoot this error indication, disable the output and rear circuit breaker (if your Apex ...
  • External Load Checks - Open/Short RF Output Path
    • Use extreme caution as this section is involves troubleshooting the output of the unit.
    • There are 4 basic components that could impede the RF path: the Apex unit output connector, the o...
      • 1. Turn the rear circuit breaker off to ensure that there is no RF power at the output of the unit.
      • 2. For the Apex output connector
        • a. Remove the output cable and visually inspect the output connector for signs of arcing or heat ...
        • b. Verify an open is measured between the center conductor and outer shield.
        • c. Make sure the output connector is mounted firmly to the chassis.
      • 3. For the output cable
        • a. Visually make sure there is a good connection between the output cable and end connectors on b...
        • b. Verify the continuity of the center conductor.
        • c. Verify the continuity of the outer shield.
        • d. Verify that there is no continuity between the center conductors and outer shields.
        • e. Swap cables if possible and retry operating the Apex.
      • 4. For the tuner and the chamber
      • The only way to truly isolate the tuner or the chamber is to swap the tuner or the Apex unit with...
    • Also consider these questions:
      • 1. Are you currently setting up a new chamber system?
      • 2. Has any work been done recently on the chamber?
      • 3. Have there been any changes in your process recently?
      • 4. Is your reflected power readings close to the Apex reflected power limit? See “Electrical Spec...
    • If you answered yes to any one of the previous questions and the Apex passed the Internal Diagnos...
  • Error Codes
    • Error codes indicate a fault condition and report the most recent active error or alarm condition...
    • Table 6-1. Error Code Table
    • E000
    • No Error
    • E001 Out of setpoint timer expired
    • If the unit is unable to reach or maintain the programmed output level within a specified amount ...
    • To avoid this error, you can disable the timer, increase the amount of allowable time, or try to ...
    • To clear this error code, you must send an RF OFF command to reset the Apex unit.
    • E004 Over Temperature Shutdown
    • This error is the same as when the Overtemp LED is on solid,
    • See “Overtemp LED on Solid” on page64.
    • E009 contactor failed to close
    • This contactor is part of the input section that follows the interlock condition. The contactor i...
    • Call AE Global Support.
    • E011 Low bus voltage limit
    • The bus voltage is basically rectified input voltage. If the bus voltage measures too low (E011) ...
    • Send RF OFF command to reset the error code. If you receive one of these error codes, make sure t...
    • E012 High bus voltage limit
    • The bus voltage is basically rectified input voltage. If the bus voltage measures too low (E011) ...
    • If you receive one of these error codes, make sure that your input voltage is within specificatio...
    • E016 Current limit
    • This usually indicates an internal failure.
    • Call AE Global Support
    • E017 EEPROM failure
    • This verifies that the option called out in PIN position 6 is actually installed.
    • Call AE Global Support.
    • E020 User interlock open
    • When the AC On LED is lit and the Interlock LED is not lit, this means either the interlock is no...
    • Make sure that the RF output cover is firmly attached and ensure the interlock pins on the User p...
    • or
    • See “Interlock LED is not Lit” on page65.
    • E025 Target life expired
    • When the user set target life ends, this error code is reported. The output will not be turned of...
    • Set new target life then send RF On command to reset unit.
    • E029 Ripple Current Error (missing phase)
    • The input line voltage is rectified internally to a bus voltage. The Apex generator monitors the ...
    • Verify that all three phases are present on the input voltage lines and that the plasma is stable...
    • E033 Temperature Rate Threshold error
    • The Apex unit monitors the rate at which the cold plate temperature is changing. If the temperatu...
    • To clear the error, send RF OFF command to reset the unit; if error code does not clear or if the...
    • E050 DeviceNet Error
    • DeviceNet error
    • Verify DeviceNet cable is connected
    • E051 Profibus Watch Dog expired
    • PROFIBUS watch dog expired
    • Have the master reestablish communications and send a “master reset” to clear the error. See “Pro...
    • E054 Profibus SPC has taken itself off-line
    • Profibus SPC has taken itself off-line
    • Cycle the Apex unit’s power off and on and reestablish communications between the master and the ...
    • E055 Profibus memory buffer overflow
    • Profibus memory buffer overflow
    • Increase the time between packets being sent to the unit via the Profibus master. See “Host Port—...
    • E059 Profibus master released slave
    • Profibus master released slave
    • To recover from the “off state,” have a Profibus master establish communications with the Apex un...
    • E101 Measurement PCB ID is incorrect
    • This indicates a configuration error.
    • Call AE Global Support.
    • E105
    • User setpoint scale factor does not match
    • This indicates a configuration error.
    • Call AE Global Support.
    • E111
    • Overtemp warning or shutdown value is out of range
    • This indicates a configuration error.
    • Call AE Global Support.
  • AE Customer Support
    • Table 6-2. Global Support Locations
    • AE, World Headquarters
    • 1625 Sharp Point Drive Fort Collins, CO 80525 USA
    • Phone: 800.446.9167 or 970.221.0108 or 970.221.0156
    • Fax: 970.407.5981
    • Email: [email protected]
    • AE, Voorhees, NJ
    • 1007 Laurel Oak Road Voorhees, NJ 08043 USA
    • Phone: 800.275.6971 or 856.627.6100
    • Fax: 856.627.6159
    • AE, California
    • 491 Montague Expressway Milpitas, CA 95035 USA
    • Phone: 408.263.8784
    • Fax: 408.263.8992
    • AE, Austin
    • 8900 Cameron Road Suite 100 Austin, TX 78754
    • Phone: 512.231.4200
    • Fax: 512.719-9042
    • AE, GmbH
    • Raiffeisenstrasse 32 70794 Filderstadt (Bonlanden) Germany
    • Phone: 49.711.77927.0
    • Fax: 49.711.7778700
    • AE, Japan KK
    • TOWA Edogawabashi Bldg. 347 Yamabuki-cho Shinjuku-ku, Tokyo Japan
    • Phone: 81.3.32351511
    • Fax: 81.3.32353580
    • AE, Korea Ltd.
    • Gongduk Building, 4th floor 272-6 Seohyun-Dong, Bundang-Gu, Sungam Si Kyunggi, 463-050 Korea
    • Phone: 82.31.705.1200
    • Fax: 82.31.705.276
    • AE, United Kingdom
    • Unit 5, Minton Place, Market Court, Victoria Road Bicester, Oxon OX6 7QB UK
    • Phone: 44.1869.320022
    • Fax: 44.1869.325004
    • AE, Taiwan, Ltd.
    • 10F-6, No. 110, Chung Shan Rd. Sec. 3, Chungho City, Taipei Hsien Taiwan 235
    • Phone: 886-2-82215599
    • Fax: 886-2-82215050
    • AE, China
    • Rm. 910 Anhui Building, No. 6007 Shennan Road, Shenzhen, China 518040
    • Phone: 86-755-3867986
    • Fax: 86-755-3867984
  • Returning Units for Repair
  • Warranty
  • Authorized Returns
  • Warranty Statement
    • Index
    • Symbols
    • Numerics
    • A
    • B
    • C
    • D
    • E
    • F
    • G
    • H
    • I
    • L
    • M
    • N
    • O
    • P
    • R
    • S
    • T
    • U
    • W
    • X