INFICON UL1000 Helium leak detector - Manual (Page 104)

104
Maintenance Work
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Scroll module Agilent TS 620 will have to be replaced. For the D16 B in the UL1000
a refurbishment will be necessary.
Approximately 10.0 hours will be needed for this maintenance work, in case that
SplitFlow 80 was exchanged.
9.5.5 Notes refering the maintenance of the SplitFlow 80
To lubricate the ball bearings, the turbo molecular pump SplitFlow 80 is filled with and
operating fluid. Replace the operating fluid every 3 years, no matter for how many
operating hours the turbo pump has been operated. The operating fluid reservoir
should be replaced by an INFICON authorized person or service technican.
Under high load operating conditions or when used in connection with processes
involving contamination, shorter replacement intervals need to be selected.
If the turbopump should be shut down for longer than a year the operating fluid
reservoir must be changed first.
The recommended bearing exchange of the SplitFlow 80 is 4 years, no matter for
how many operating hours the pump has been used. The replacement of the pump
is recommended for those customer, who has to guarantee a 100% up-time for the
unit. In this case the turbopump SplitFlow 80 will be replaced by a refurbished pump.
9.6 Description of the Maintenance Work
Modifications to the UL1000 and UL1000 Fab/UL1000 which exceed the scope of
normal maintenance work must only be performed by trained personnel.
Work to be done Required materials Part No.
Replace scroll head (Agilent TS 620) Scroll head for Agilent TS 620 200001665R
Refurbish D16 backing pump
(UL1000 only)
Refurbished D16 B backing pump
Disassemble/clean the valve block
Replace the valve seals
Seal kit for valve block
Seal kit for valves
200000593
200000594
Check/replace filter
Replacement filter cell for fan
Replacement filter for venting and
purge gas line
Silencer for exhaust (UL1000 Fab
only)
Oil filter insert (10 pcs.) UL1000
only
200000685
200000683
20099183
200000694
Preventive exchange of the SplitFlow
80 after 3 years, without limitation of
operating hours. Please refer to
9.5.5
Refurbished turbopump SplitFlow
80.
200003800R
Test and alignment
STOP Danger
The protective ground conductor distributor screw at the bottom of the chassis must
not be loosened. If the protective ground conductor connection is not in place, the
operator will not be protected against electric shock.