Technical data, Physical data, Electrical data – INFICON UL1000 Helium leak detector User Manual

Page 15: 2 technical data

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General Information

15

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l ha

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40

8)

1.3.2

Technical Data

1.3.2.1

Physical Data

Hinweis To get down to the minimum detected leak rate range some conditions

must be fulfilled:

UL1000 and UL1000 Fab has fully warmed up

Ambient conditions must be stable (temperature, no vibration/accelerations.)

The part under test has been evacuated long enough (background is no longer
decreasing)

ZERO must be active

1.3.2.2

Electrical Data

Max. inlet pressure

15 mbar

Minimum detectable Helium leak rates

in vacuum mode (ULTRA)

<5×10

-12

mbar l/s

limit of detection in sniffer mode

<5×10

-8

mbar l/s

Maximum displayable helium leak rate in ULTRA

0.1 mbar l/s

Measurement range

12 decades

Time constant of the leak rate signal (blanked off,
63% of the final value)

<1 s

Pumping speed (Helium) at the inlet

Max. roughing capability

25 m

3

/h (50 Hz)

17.6 cfm (50 Hz)

30 m

3

/h (60 Hz)

21.1 cfm (60 Hz)

in vacuum mode

GROSS mode

8 l/s

FINE mode

7 l/s

ULTRA mode

2.5 l/s

Detectable masses

2, 3 and 4

Mass spectrometer

180° magnetic sector field

Ion source

2 filaments;
Iridium/Yttria-oxide

Inlet port

DN 25 KF

Run-up time (after starting)

3 min

Part no. 550 - 000A, 550 - 100A

230 V 50 Hz

Part no. 550 - 001A, 550 - 101A

115 V 60 Hz

Part no. 550 - 002A

100 V 50/60 Hz

Power consumption

1100 VA

Type of protection

IP20

Power cords (EU, USA, UK)

3 m

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