INFICON UL1000 Helium leak detector - Manual (Page 114)

114
Maintenance Work
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9.12 Scroll Pumps (UL1000 and UL1000 Fab only)
The maintenance intervals of the scroll pump (Agilent TS620) is given in the
maintenance plan detailed in
9.4 .
We recommend to have this maintenance work done by the INFICON Service or a
service partner authorised by INFICON.