INFICON STM-100/MF Thin Film Deposition Monitor - Manual (Page 10)

List of Figures
Figure 1.1: Standard Sensors. ................................................................................................. 1-4
Figure 2.1: STM-100 / MF Front Panel. .................................................................................. 2-1
Figure 2.2: System Control Keys. ............................................................................................ 2-1
Figure 2.3: Data Entry And Programming Keys. ..................................................................... 2-2
Figure 2.4: LCD Data Areas. .................................................................................................... 2-4
Figure 2.5: LCD Variable Parameter Legends. ........................................................................ 2-4
Figure 2.6: Film Number Parameter. ....................................................................................... 2-4
Figure 2.7: Density Parameter. ................................................................................................ 2-5
Figure 2.8: Z-Factor Parameter. .............................................................................................. 2-5
Figure 2.9: End Thickness Parameter. .................................................................................... 2-6
Figure 2.10: Set Point Thickness Parameter. .......................................................................... 2-7
Figure 2.11: Set Point Timer Parameter. ................................................................................. 2-7
Figure 2.12: Tooling Parameter. .............................................................................................. 2-8
Figure 2.13: Configuration Switch Settings. ............................................................................. 2-9
Figure 3.1: Rear Panel. ............................................................................................................ 3-1
Figure 3.2: Recommended Grounding Procedure. .................................................................. 3-2
Figure 3.3: Recorder Output Plug. ........................................................................................... 3-5
Figure 3.4: Example of Thickness Mode Recorder Output. ..................................................... 3-6
Figure 3.5: Example of Rate Mode Recorder Output. ............................................................. 3-6
Figure 3.6: Cable Connections From STM to MSDos Computers. ......................................... 3-7
Figure 3.7: Typical System. ..................................................................................................... 3-8
Figure 3.8: Head Mounting Dimensions................................................................................... 3-9
Figure 4.1: Typical Tooling Factors. ......................................................................................... 4-3
Figure 5.1: Cable Connection From STM-100 / MF to IBM-AT. .............................................. 5-1
Figure 5.2: Connections for STM-100 / MF to PC Compatible Computers. ........................... 5-2
Figure 5.3: BASIC Driver Routine. ........................................................................................... 5-4
Figure 5.4: HP-85 IEEE-488 BASIC Driver Program. .............................................................. 5-7
Figure 6.1: Sensor and Feed Through Connections. ............................................................... 6-3
Figure 6.2: Test Oscillator OSC-100A. .................................................................................... 6-4
Figure 6.3: SM75, MicroDot

Connector. ................................................................................ 6-4
Figure C.1: SHMX-4 Front Panel ............................................................................................. C-1
Figure C.2: Firmware ROM Label ............................................................................................ C-2
Figure C.3: SHMX-4 Back Panel ............................................................................................. C-2
Figure C.4: SHMX-4 to STM-100 Control Cable ...................................................................... C-3
List of Figures Page viii