INFICON STM-100/MF Thin Film Deposition Monitor - Manual (Page 14)

GENERAL INFORMATION
INTRODUCTION
The STM-100 / MF from Sycon Instruments, Inc. represents a new class
of thin film monitor. It uses the time-proven 6 MHz oscillating quartz crystal as
the sensor device. The STM-100 / MF is constructed with advanced LSI and
microprocessor technology. This enables the direct solution of the complex
mathematical equation associated with the frequency shift versus mass
loading characteristics of the quartz crystal sensor. Its computational power
allows the measurement of the material accumulated on the sensor crystal to
be accurately converted to film thickness using the exact equation;
inaccuracies due to approximations and limited ranges of material constants
do not contribute to thickness and rate errors. A high frequency period
measurement clock (over 70 MHz) enables the STM-100 / MF to make and
display 4 measurements/second with one-tenth Angstrom rate resolution. The
STM-100 / MF is equipped with 4 setpoint relays, 4 remote inputs, a computer
interface (RS-232) supporting 2 protocols including SECS-II, and a high
resolution analog recorder output. A rack mount for half-rack mounting is also
standard. If desired, the front panel LCD can be configured, by rear panel
switch setting, to display the frequency of the sensing crystal instead of
computed rate and thickness. STM-100 / MF 's manufactured and shipped
after October 1990 have the additional capability of storing film parameter for
nine film or processes. Earlier STM's can be factory upgraded to include this
feature. An extra-cost option is a second computer interface. This factory
installed upgrade can be either IEEE-488 or BITBUS.
UNPACKING
The STM-100 / MF comes with a power cord, and connectors for the RS-
232 interface, the I/O interface and analog output. If the OSC-100 or crystals
were ordered at the same time, they will also be included. The unit is shipped
with the rack mount attached, which may be removed for table top operation.
To complete a system installation a sensing head and a vacuum to air
feedthrough are required. Schematic drawings and a MSDOS Format diskette
of demonstration software are included with this manual. Refer to Appendix A
for a detailed description of the included software. The unit comes set for the
line voltage as ordered. If you need to change it, refer to Section 3.2. Make
sure that you install the correct fuses when changing line voltage. If it is ever
necessary to return the unit to Sycon, for any reason, call and obtain an Return
Authorization (RA) number before returning the unit.
SECTION 1.1
SECTION 1.2
Page 1 - 1 GENERAL INFORMATION