Get the status of the end thickness relay, Get the remote input status, Get the configuration switch status – INFICON STM-100/MF Thin Film Deposition Monitor User Manual
Page 66: Get the thickness value, Get the rate value, Get the sensor frequency, Page 5 - 11 computer interfacing
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Command:
P
Parameter:
None
Description:
Returns the status of the end thickness status. This is not tied to a relay, but to an
annunciator. End Thickness closes the shutter and sets this status. A Zero
Thickness command clears this status.
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Command:
Q
Parameter:
None
Description:
Returns the status of the 4 remote inputs. A code of @..O is sent back. The lower 4
bits of the character represent the 4 inputs. A 1 indicates that the input is at ground.
A 0 indicates that the input is open or at a logic high. The following table defines the
response bit weights with each input.
Input Name
Active "ON" Weight
Zero Timer
1
Zero Thickness
2
Shutter Close
4
Shutter Open
8
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Command:
R
Parameter:
None
Description:
Returns the status of the configuration switches. Because there are 12 switches, the
returned value is between 0 and 4095. A value of 0 indicates that all switches are in
the OFF (or down) position. Switch number 12 is theLS (1) bit, switch number 1 is
the MS (2048) bit.
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Command:
S
Parameter:
None
Description:
Returns the thickness value, in Angstroms. This number will always contain 7 digits
with a leading space or minus sign. Leading zeros are not suppressed.
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Command:
T
Parameter:
None
Description:
Returns the rate value, in A/s. The format is a leading space or minus followed by
NNN.N.
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Command:
U
Parameter:
None
Description:
Returns the sensor frequency, in Hz. If the crystal has failed, the number is the last
valid reading, or blanks if there was never a good reading.
Get the Status of the
End Thickness Relay
Get the Remote Input
Status
Get the Configuration
Switch Status
Get the Thickness
Value
Get the Rate Value
Get the Sensor
Frequency
Page 5 - 11
COMPUTER INTERFACING