INFICON STM-100/MF Thin Film Deposition Monitor - Manual (Page 21)

OPERATION AND PROGRAMMING
KEYBOARD DESCRIPTION
The STM-100 / MF keyboard is divided into two separate functional
groups. The keys to the left of the LCD display are system control keys and
the keys to the right of the display are data entry and programming keys. All
keys are sensed when depressed and must be released to cause further
action. The exceptions to this rule are the (LIFE) and (ARROW) keys. These
keys will cause continuous action if held depressed. An audible beep will
accompany each key activation. The beeper may be disabled if desired. See
Section 2.7.
STM - 100 / MF THICKNESS / RATE MONITOR instruments
SHUTTER SENSOR
OPEN ZERO
CLOSE LIFE
DENS Z-FACT END THK
XTAL FAIL
SHUTTER
SP TIME
SP THICK
SP THK SP TMR TOOL
PGM
COM
DATA ENTRY
PROGRAM
ENTER DATA
Figure 2.1: STM-100 / MF Front Panel.
SYSTEM CONTROL KEY GROUP
OPEN
CLOSE
SENSOR SHUTTER
ZERO
LIFE
Figure 2.2: System Control Keys.
SHUTTER OPEN
Activating the SHUTTER OPEN key will cause the internal shutter relay
contacts to close. This relay is typically used to control a deposition system
source shutter. The LCD display (SHUTTER) legend will be visible when the
shutter relay is active. This key is active at all times and states (Program and
Normal) of the STM-100 / MF. A remote input duplicating this key function is
also provided.
SECTION 2.1
SECTION 2.2
OPEN
CLOSE
SHUTTER
Shutter Keys
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