Zero key, Crystal life key, Data entry and programming group – INFICON STM-100/MF Thin Film Deposition Monitor User Manual

Page 22: Section 2.3, Figure 2.3: data entry and programming keys, Program key

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SHUTTER CLOSE

The SHUTTER CLOSE key provides the reverse function of the

SHUTTER OPEN key. This key is active at all times and states of the
STM-100 / MF. A remote input duplicating this key function is also provided.

ZERO

The ZERO key provides two functions, "THICKNESS ZERO" and "TIMER

ZERO". Activating the key will cause any accumulated reading in the
thickness display to be set to zero, thus providing a new accumulation
reference point. It will also reset the elapsed timer and display to the setpoint
value contained in the program memory. Any setpoint relays that may have
been closed at the time of the "ZERO" key operation will be reset to the open
state. This key is inactive in the PROGRAM mode. Remote inputs providing
separate operation of the THICKNESS ZERO and TIMER ZERO operations
are also provided. Note that during a Crystal Fail condition, the Zero key does
not function.

LIFE

Activating the CRYSTAL LIFE key will provide the user with a measure of

remaining possible sensor crystal life. This information is expressed in percent
with 100% representing a new sensor crystal and 0% indicating a fully loaded
sensor crystal (1MHz frequency shift). This information is presented where
rate information is normally shown. This data should serve as an indicator for
the need to change the sensor crystal. The frequency of the sensor crystal to
the nearest kilohertz is also presented. This information is shown where
accumulated thickness data is normally displayed. A new sensor crystal
should indicate close to 99% life and a frequency near 5.950 MHz. This key
function is inactive in the PROGRAM mode. Activating this key during a
CRYSTAL FAIL condition may result in a blank data display. The LIFE display
is active as long as the LIFE key is held depressed.

DATA ENTRY AND PROGRAMMING GROUP

DATA

ENTER

PROGRAM

DATA ENTRY

Figure 2.3: Data Entry And Programming Keys.

PROGRAM

Activation of the PROGRAM key places the instrument in a mode wherein

the internal parameter variables may be viewed or modified. Data view
operation is always available whereas, data modification may be inhibited by a
user option switch on the rear panel. If the instrument is in the PROGRAM
mode, depressing the PROGRAM key will return the unit to the normal display
mode. Six variable parameters, for each of nine films of the STM-100 / MF

ZERO Key

ZERO

Crystal Life Key

LIFE

SECTION 2.3

Program Key

PROGRAM

OPERATION AND PROGRAMMING

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