INFICON STM-100/MF Thin Film Deposition Monitor - Manual (Page 78)

Usage:
RATE.EXE [x]
Where [x] is the COM port ( 1 or 2) that the STM-100 is connected to.
This program is a text based routine and runs in one window on the screen.
The Rate Program Display Shows:
1. THICKNESS Thickness value from the unit in Angstroms.
2. TIMER Timer value from the unit.
3. TIME ON The time in minutes since the start button [ F1]
was pressed.
4. TOTAL THICKNESS The total thickness since the start button was
pressed. This corresponds to the Time On value.
5. RATES a. INSTANT Angstrom per second. Corresponds
to the Instantaneous rate that is read from the unit.
b. BY THE MINUTE Angstroms per minute. This is
the average rate for the past minute of operation,
converted to angstroms per minute.
c. BY THE HOUR Angstroms per hour. This is
the average rate for the past hour of operation,
converted to angstroms per hour.
d. TOTAL Angstroms per minute. This is the total
rate calculated from the time the start button was
pressed. Converted to Angstroms per minute.
6. CRYSTAL LIFE This is the crystal life, in percent, that remains for
the current crystal.
7. USER PARAMETERS: Parameter values follow the same rules as the
STM-100 / MF.
a. Density.
< F3 >
b. Tooling < F4 >
c. Zfactor < F5 >
d. Timer Set Point < F6 >
e. Thickness Set Point < F7 >
f. End Thickness Set Point < F8 >
g. Zero the Timer < F9 >
h. Zero the Thickness < F10 >
i. Data Save file <SHIFT F1>
Functions
i.1. Prompts user for the name of the file and the
time interval for saving the data,
minimum 1
second.
i.2. Toggles the Save feature.
8. DYNAMIC KEYS a. < F1 > Start / Stop
b. < F2 > Open / Close The Shutter.
c. ESC To Exit the Program.
Communication Demo Disk Page A-2