INFICON STM-100/MF Thin Film Deposition Monitor User Manual
INFICON Equipment
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Table of contents
Document Outline
- MF2-CVRG
- MF2-PFG
- MF2-S1G
- MF2-S2G
- OPERATION AND PROGRAMMING
- KEYBOARD DESCRIPTION
- SYSTEM CONTROL KEY GROUP
- DATA ENTRY AND PROGRAMMING GROUP
- FILM PARAMETERS
- USER CONFIGURATION SWITCHES
- SWITCH FUNCTION DEFINITIONS
- TEST MODE
- BEEPER
- OPERATION AND PROGRAMMING
- MF2-S3G
- INSTALLATION
- Electrical Connections and Descriptions
- GROUND
- I/O INTERFACE CONNECTION
- RELAY OUTPUTS
- REMOTE INPUTS
- SENSOR CONNECTION
- ANALOG RECORDER INTERFACE
- RS-232 SERIAL COMMUNICATIONS INTERFACE
- COMMUNICATIONS OPTIONS
- DEPOSITION SYSTEM INSTALLATION
- Installing Water Lines
- VACUUM FEEDTHROUGH
- ELECTRICAL IN-VACUUM CABLE
- INSTALLATION
- MF2-S4G
- MF2-S5G
- COMPUTER INTERFACING
- RS-232 INTERFACE
- BAUD RATES and CABLING
- Sycon Protocol
- SECS-II Protocol
- IEEE-488 INTERFACE OPTION
- COMMANDS
- RESPONSE FORMAT
- DETAILED COMMAND DESCRIPTION
- SECTION 5.6
- Software Version Code
- Shutter Relay Control
- Zero Thickness and Timer
- Zero Thickness
- Zero Timer
- Set the Density Parameter
- Set the Z-Factor Parameter
- Set the End Thickness
- Set the Setpoint Relay Thickness
- Set the Timer Relay Parameter
- Set the Tooling Factor Parameter
- Turn the Test Mode On/Off
- Acknowledge the Status of Non-Volitile Memory
- Get the Crystal Fail Status
- Get the Status of the Setpoint Timer Relay
- Get the Status of the Setpoint Thickness Relay
- Get the Status of the End Thickness Relay
- Get the Remote Input Status
- Get the Configuration Switch Status
- Get the Thickness Value
- Get the Rate Value
- Get the Sensor Frequency
- Get the Crystal Life Value
- Get the Timer Value
- Get the Shutter Close Event Thickness Log
- Get the Shutter close Time Log
- Get the Log Event Rate
- Get the Power on Status
- Force Parameters to Their Default Values
- Turn the Key Board Beeper On/Off
- Internal Use Commands
- Multi-Film Film Number Selection
- Multi-Film Density Parameter
- Multi-Film Z-Factor Parameter
- Multi-Film End Thickness Parameter
- Multi-Film Set Point relay Thickness Parameter
- Multi-Film Set Point Timer Relay Parameter
- Multi-Film Tooling Factor Parameter
- SECTION 5.6
- COMPUTER INTERFACING
- MF2-S6G
- Mf2-apdxG