INFICON STM-100/MF Thin Film Deposition Monitor - Manual (Page 25)

increased or decreased by using the up and down arrow keys. Pushing the
enter button selects the film number shown to be the current film and displays
the first parameter (density) of that film. Each of the film parameters can now
be reviewed or changed by using the DATA keys and / or the ENTER key.
WARNING When leaving the Program Mode, the last Selected
FILM is the current active FILM.
DENSITY
Figure 2.7: Density Parameter.
LEGEND DENS
RANGE 0.500 to 99.99
UNITS gm/cc
The DENSITY parameter refers to the measured material density in
gm/cc. This constant is normally the bulk material value but is sometimes
different due to deposition and film growth conditions. This value is utilized in
the thickness equation to convert measured mass to a thickness value. See
Table 4.1 for an extensive value list. See Section 4.2 for calibration
information.
Z-FACTOR
Figure 2.8: Z-Factor Parameter.
LEGEND Z-FACT
RANGE 0.100 to 9.999
UNITS NONE
Density Parameter
Page 2 - 5 OPERATION AND PROGRAMMING