INFICON STM-100/MF Thin Film Deposition Monitor - Manual (Page 99)

SHMX-4
9 PIN Female
STM-100
5 GND
1 Sensor Fail
3 B Select
4 A Select
Pin 2
Pin 4
Pin 15
Pin 8
Ground
Control Cable, SHMX-4 to STM-100
15 PIN Female
Optional Inputs
Pin 9, Zero Timer
Pin 10, Zero Thickness
Pin 11,Shutter Close
Pin 12, Shutter Open
Pins 13, 14 GND
Pin 1
Pin 3
Pin 7
Pins 1, 3 and 7 tied to pin 15
6 ,7, 8, 9 Internal GND
Channel Select
Input / Output
Figure C.4: SHMX-4 to STM-100 Control Cable
The Optional inputs for opening and closing the shutter and zeroing the
timer and thickness can still be accessed by rewiring the 15 pin connector.
SHMX-4 Relay Output 9 pin D male.
Function Pins
Sensor 1 Active 1 and 2
Sensor 2 Active 3 and 4
Sensor 3 Active 5 and 6
Sensor 4 Active 7 and 8
GND 9
The Relay Output Connection provides external active channel indication.
The connector pins map as follows. The corresponding relays will open and
close when the active sensor is changed.
Page C- 3 SHMX-4 Operation