INFICON STM-100/MF Thin Film Deposition Monitor - Manual (Page 24)

Figure 2.4: LCD Data Areas.
The STM-100 / MF incorporates six programmable parameter variables
for each of nine films programmable by the user. Three variables are used by
the thickness equation and are related to material physical constants and
system geometry (Density, Z-Factor, and Tooling). The three remaining
parameters are used as setpoint values to activate the internal relays on the
I/O connector.
Each variable has a specific LCD legend associated with it. These
legends are only active in the PROGRAM mode and only one will be on at a
time. Each parameter is discussed in more detail below.
Figure 2.5: LCD Variable Parameter Legends.
After entering the program mode by pushing the Program Button the
current film number is displayed in the upper left hand corner of the LCD
display. (FL.n, n is 1 through 9). Refer to Figure 2.6.
PROGRAM
ENTER DATA
Figure 2.6: Film Number Parameter.
At this point the current film's parameters may be reviewed or changed or
a new current film selected. To select a new current film the film number is
Film Number
Parameter
OPERATION AND PROGRAMMING Page 2 - 4