INFICON STM-100/MF Thin Film Deposition Monitor - Manual (Page 23)

may be programmed by the user. Two of these material constants are needed
to provide correct thickness and rate information for a particular film material
and one is a constant used to correct for system sensor and substrate
geometry variations. Three setpoint variables are provided to activate relay
events. Two of these are related to thickness and one to elapsed time. These
variables and their meanings are discussed in detail in Section 2.4.
ENTER
The ENTER key has two functions. It is used (1) to sequence through
the six parameter variables, one parameter for each press of the ENTER key,
and (2) to place modified variable data into the non-volatile storage memory of
the instrument. This data will be retained until modified by the user even with
no power to the instrument. A legend on the LCD display will indicate which
variable parameter data is being displayed. Any modifications to parameter
data occur in the display memory only, and will cause the associated
parameter legend to flash. The flashing legend indicates that a parameter
change has been made but has not yet been saved in memory. To store the
data in memory the ENTER key must be pressed. Exiting the PROGRAM
mode (via the PROGRAM key) while a parameter legend is flashing does not
cause the modified data to be saved. Previously saved parameter data will be
retained. The ENTER key only functions in the PROGRAM mode.
ARROW KEYS
The ARROW keys are used to select the active film and to increment or
decrement the displayed parameter variable data in order to achieve the
desired value. The rate of incremental change will increase as the key is held
depressed. This will speed up parameter changes covering a large dynamic
data range. Letting up on the key and then resuming key depression will reset
the rate of change to the slowest rate and it will again increase with time as the
key remains depressed.
FILM PARAMETERS
The STM-100 / MF utilizes a high contrast liquid crystal display for the
viewing device. All measurement data, instrument status, and program
variable operations are viewable on the display. A three or four digit parameter
display and a four digit time display (min:sec) are used to display the dynamic
data.
Enter Key
ENTER
Arrow Keys
DATA
SECTION 2.4
LCD Data Displays
Page 2 - 3 OPERATION AND PROGRAMMING