Alicat MC Series Mass Flow Controller User Manual

Page 29

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29

FLOW

Process

Vacuum Source

Inverse Mass Flow (or Volumetric Flow)Control with Vacuum

Process

Gas Source

Vacuum Source

Flowing Absolute Pressure Control

Back-Pressure Control

Positive Pressure Control

FLOW

Process

Gas Source

Vacuum Source

Bidirectional Mass Flow (or Volumetric Flow)Control

FLOW

FLOW

Closed Process

Gas Source

Atmosphere or Vacuum

Dead-Ended Absolute Pressure Control

FLOW

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