Alicat MC Series Mass Flow Controller - Manual (Page 51)

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 

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  
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MC-Series:
0 - 100 sccm
0 - 200 sccm
0 - 500 sccm
0 - 1 slpm
0 - 2 slpm
0 - 3 slpm
0 - 5 slpm
0 - 10 slpm
0 - 20 slpm
MC-Series:
0 - 0.5 sccm
0 - 1 sccm
0 - 2 sccm
0 - 5 sccm
0 - 10 sccm
0 - 20 sccm
0 - 50 sccm
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


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
 
   
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0.5 sccm to 50 sccm approximate shipping weight: 1.1 lb.
100 sccm to 20 slpm approximate weight: 1.2lb