Alicat MC Series Mass Flow Controller User Manual

Page 65

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65

Technical Data for Alicat MCS and MCRS-Series Mass Flow Controllers

Alicat MCS and MCRS instruments are built for use with aggressive gases. For

the most part, these instruments maintain the specifications of equivalently

ranged MC and MCR-Series devices.

Please refer to Alicat’s Technical Data and Specifications for the equivalently

ranged MC and MCR-Series instrument for all operating specifications except:

Operating Range

1% to 100% Full Scale

Turndown Ratio

100 : 1

Wetted Materials

316LSS, 303SS, 430FRSS, FFKM (Kalrez) standard,

Viton, EPDM as needed for some gases.

The dimensions of MCS and MCRS instruments may vary from their standard

MC and MCR-Series counterparts. Dimensional drawings for MCS and MCRS

instruments are shown on pages 66 -69

Standard Compatible Gas List for MCS and MCRS Controllers

0

Air

Air

1

Argon

Ar

2

Methane

CH4

3

Carbon Monoxide

CO

4

Carbon Dioxide

CO2

5

Ethane

C2H6

6

Hydrogen

H2

7

Helium

He

8

Nitrogen

N2

9

Nitrous Oxide

N2O

10

Neon

Ne

11

Oxygen

O2

12

Propane

C3H8

13

normal-Butane

n-C4H10

14

Acetylene

C2H2

15

Ethylene

C2H4

16

iso-Butane

i-C4H10

17

Krypton

Kr

18

Xenon

Xe

19 Sulfur Hexafluoride

SF6

20

75%Ar / 25% CO2

C-25

21 90% Ar / 10% CO2

C-10

22

92% Ar / 8% CO2

C-8

23

98% Ar / 2% CO2

C-2

24 75% CO2 / 25% Ar

C-75

25

75% Ar / 25% He

A-75

26

75% He / 25% Ar

A-25

27

90% He / 7.5% Ar /

2.5% CO2

Helistar® A1025

A1025

28

90% Ar / 8% CO2 /

2% O2

Stargon® CS

Star29

29

95% Ar / 5% CH4

P-5

30

Nitric Oxide

NO

31 Nitrogen Triflouride

NF3

32

Ammonia

NH3

34

Hydrogen Sulfide

H2S

36

Propylene

C3H6

In addition, the following gases are

available upon request:

Nitrogen Dioxide to 0.5%

in an inert carrier

NO2

Refrigerant gases to 100%

Other gases to 1000 ppm in an inert

carrier

If your application requires another gas or gas mixture, please contact

[email protected] or call 888-290-6060.

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