Range specific specifications – Alicat MC Series Mass Flow Controller User Manual

Page 55

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Technical Data for Whisper Low Pressure Drop Mass Flow Controllers

0 to 0.5 sccm Full Scale through 0 to 500 slpm Full Scale

Performance

Whisper MCW & MCRW Mass Flow Controller

Accuracy at calibration

conditions after tare

± (0.8% of Reading + 0.2% of Full Scale)

High Accuracy at calibration

conditions after tare

± (0.4% of Reading + 0.2% of Full Scale)

High Accuracy option not available for units ranged under 5 sccm or over 500 slpm.

Repeatability

± 0.2% Full Scale

Zero Shift and Span Shift

0.02% Full Scale / ºCelsius / Atm

Operating Range / Turndown Ratio

0.5% to 100% Full Scale / 200:1 Turndown

Maximum Controllable Flow Rate

102.4% Full Scale

Typical Response Time

100 ms (Adjustable)

Warm-up Time

< 1 Second

Standard Specifications (Contact Alicat for available options.)

Communications / Power

Whisper MCW & MCRW Mass Flow Controller

Monochrome LCD or Color TFT

Display with integrated touchpad

Simultaneously displays Mass Flow, Volumetric Flow, Pressure and Temperature

Digital Input/Output Signal

1

Options

RS-232 Serial / RS-485 Serial / PROFIBUS

3

Analog Input/Output Signal

2

Options

0-5 Vdc / 1-5 Vdc / 0-10 Vdc / 4-20 mA

Optional Secondary Analog

Input/Output Signal

2

0-5 Vdc / 1-5 Vdc / 0-10 Vdc / 4-20 mA

Electrical Connection Options

8 Pin Mini-DIN / 9-pin D-sub (DB9) / 15-pin D-sub (DB15) / 6 pin locking

Supply Voltage

MCW: 12 to 30 Vdc (15-30 Vdc for 4-20 mA outputs)

MCRW: 24 to 30 Vdc

Supply Current

MCW: 0.250 Amp

MCRW: 0.750 Amp

1. The

Digital Output Signal communicates Mass Flow, Volumetric Flow, Pressure and Temperature

2. The

Analog Output Signal and Optional Secondary Analog Output Signal communicate your choice of Mass

Flow, Volumetric Flow, Pressure or Temperature

3. If selecting

PROFIBUS, no analog signal is available. PROFIBUS units do not have the display. See PROFIBUS

specifications for PROFIBUS supply voltages and currents. (

www.alicat.com/profibus)

Operating Conditions

Whisper MCW & MCRW Mass Flow Controller

Mass Reference Conditions (STP)

25ºC & 14.696 psia (standard — others available on request)

Operating Temperature

−10 to +50 ºCelsius

Humidity Range

(Non–Condensing)

0 to 100%

Maximum Pressure

50 psig Higher line pressures available, please contact Alicat.

Mounting Attitude Sensitivity

MCW: None

MCRW: Mount with valve cylinder vertical & upright

Valve Type

Normally Closed

Ingress Protection

IP40

Wetted Materials

MCW: 303 & 302 Stainless Steel, Viton®, Silicone RTV (Rubber), Glass Reinforced

Nylon, Aluminum, Brass, 430FR Stainless Steel, Silicon, Glass.

MCRW: 303 & 302 Stainless Steel, Viton®, Silicone RTV (Rubber), Glass Reinforced

Nylon, Aluminum, 416 Stainless Steel, Nickel, Silicon, Glass.

If your application demands a different material, please contact Alicat.

Range Specific Specifications

Full Scale Flow Mass

Controller

Pressure Drop at FS Flow

(psid) venting to atmosphere

Mechanical

Dimensions

Process Connections

1

MCW 0.5 sccm to 2 sccm

0.06

3.9”H x 3.4”W x 1.1”D

M-5 (10-32) Female

Thread

2

MCW 5 sccm to 10 sccm

0.08

MCW 20 sccm

0.07

MCW 50 sccm to 200 sccm

0.07

4.1”H x 3.6”W x 1.1”D

1/8” NPT Female

MCW 500 sccm

0.08

MCW 1 slpm

0.10

MCW 2 slpm

0.18

MCRW 5 slpm

0.10

5.5”H x 7.7”W x 2.3”D

1/4” NPT Female

MCRW 10 slpm

0.12

MCRW 20 slpm

0.26

MCRW 40 slpm

0.14

5.5”H x 7.7”W x 2.3”D

1/2” NPT Female

MCRW 50 slpm

0.17

5.5”H x 7.3”W x 2.3”D

3/4” NPT Female

MCRW 100 slpm

0.30

MCRW 250 slpm

0.69

MCRW 500 slpm

0.69

5.5”H x 8.1”W x 2.7”D

3/4” NPT Female

1. Compatible with Beswick®, Swagelok® tube, Parker®, face seal, push connect and compression adapter fittings. VCR and

SAE connections upon request.

2. Shipped with M-5 (10-32) Male Buna-N O-ring face seal to 1/8” Female NPT fittings.

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