Alicat MC Series Mass Flow Controller - Manual (Page 66)

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MCS-Series:
0 – 0.5 sccm
0 – 1 sccm
0 – 2 sccm
0 – 5 sccm
0 – 10 sccm
0 – 20 sccm
0 – 50 sccm
MCS-Series:
0 – 100 sccm
0 – 200 sccm
0 – 500 sccm
0 – 1 slpm
0 – 2 slpm
0 – 5 slpm
0 – 10 slpm
0 – 20 slpm
0.5 sccm to 50 sccm approximate shipping weight: 1.1 lb.
100 sccm to 20 slpm approximate weight: 1.2 lb