INFICON STM-2 USB Thin Film Rate/Thickness Monitor - Manual (Page 13)

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STM-2 Operating Manual
Chapter 1
Introduction and Specifications
1.1 Introduction
STM-2™ is a USB-powered thin film thickness and rate deposition monitor (see
Figure 1-1 ). STM-2 provides precise control of thickness or mass deposition
experiments using a USB connection, Windows® or LabVIEW™ software
(provided), and a Windows computer (user supplied).
The STM-2 internal oscillator allows the sensor to be located within 76.2 cm (30 in.)
of STM-2. An external oscillator, PN 783-500-013, can be used when the sensor is
located farther than 101.6 cm (40 in.) from STM-2.
STM-2 can take ten measurements per second. The measurements are shown on
a 0.01Å/s rate display. STM-2 LabVIEW software has an option for multi-layer
mode. This mode enables a Layer Stackup pane, displaying a list of process
layers. It also enables cumulative substrate thickness to be displayed on the
software (see
section 4.3.1 on page 4-6 ).
Figure 1-1 STM-2
1.1.1 Related Manuals
Sensors are covered in separate manuals. These manuals are contained in the
Thin Film Manuals CD (PN 074-5000-G1), which is part of the ship kit.
 PN 074-154—Bakeable Sensor
 PN 074-156—Front Load Sensor, Single/Dual
 PN 074-157—Sputtering Sensor
 PN 074-609—Cool Drawer Sensor, Single/Dual