Appendix a material table, A.1 introduction, Appendix a – INFICON STM-2 USB Thin Film Rate/Thickness Monitor User Manual
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Appendix A
Material Table
A.1 Introduction
The following
represents the density and Z-Ratio for various materials.
The list is alphabetical by chemical formula.
CAUTION
Some of these materials are toxic. Please consult the
material safety data sheet and safety instructions before
use.
An * is used to indicate that a Z-Ratio has not been established for a certain
material. A value of 1.000 is defaulted in these situations.
Table A-1 Material Table
Formula
Density
Z-Ratio
Material Name
Ag
10.500
0.529
silver
AgBr
6.470
1.180
silver bromide
AgCl
5.560
1.320
silver chloride
Al
2.700
1.080
aluminum
Al
2
O
3
3.970
0.336
aluminum oxide
Al
4
C
3
2.360
*1.000
aluminum carbide
AIF
3
3.070
*1.000
aluminum fluoride
AIN
3.260
*1.000
aluminum nitride
AlSb
4.360
0.743
aluminum antimonide
As
5.730
0.966
arsenic
As
2
Se
3
4.750
*1.000
arsenic selenide
Au
19.300
0.381
gold
B
2.370
0.389
boron
B
2
0
3
1.820
*1.000
boron oxide
B
4
C
2.370
*1.000
boron carbide
BN
1.860
*1.000
boron nitride
Ba
3.500
2.100
barium
BaF
2
4.886
0.793
barium fluoride