INFICON XTC/3 Thin Film Deposition Controller Software Editor Operating Manual User Manual
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XTC/3 Editor Operating Manual
Figure 4-16 Generating a Report - SOD Data selections
If live data are being displayed, the Input Data File Name box will be blank and the
Number of Scans will be incrementing. Leaving the Input Data File Name box
blank will generate a report for the live data being acquired. If you are generating
a report for a recalled data file, that filename will be shown in the Input Data File
Name box. If the desired data file is not being displayed, click on the Browse
button and use the standard XTC/3 Editor file Open dialog to select the file or files
for which to generate a report. To select multiple files highlight the first file, press
and hold the control key, click on the other files to select them, and then release
the control key. Holding the shift key down and clicking will select all the files
between the current selection and where the mouse was clicked.
The output filename, by default, is the same as the input filename but with a
.txt
(tab separated) or
.csv
(comma separated) extension. When reporting a single
file, this name can be changed to any valid filename. When reporting multiple files,
it is possible, although not recommended, to edit the list of output files.
Select one or more parameters from the list of parameters (Rate, RateDev, Power,
Thickness, Frequency and Crystal Life) or click the All check box to select all.
Enter the range of scans of interest in the Scan Range box or click the All check
box for all scans.