INFICON BPG402-Sx ATM to Ultra-High Vacuum Gauge - Manual (Page 25)

tina46e1-a (2010-03) BPG402.om
25
4 Operation
The BPG402-Sx vacuum gauges consist of two separate measuring systems (hot
cathode Bayard-Alpert (BA) and Pirani).
The hot cathode measuring system uses an electrode system according to Bayard-
Alpert which is designed for a low X-ray limit.
The measuring principle of this measuring system is based on gas ionization.
Electrons emitted by the operating filament (F1 or F2,
→ below) ionize a number of
molecules proportional to the pressure in the measuring chamber. The ion collector
(IC) collects the produced ion current I
+
and feeds it to the electrometer amplifier of
the measurement instrument. The ion current is dependent upon the emission cur-
rent I
e
, the gas type, and the gas pressure p according to the following relationship:
I + = I
e
× p × C
Factor C represents the sensitivity of the gauge head. It is generally specified for
N
2
.
The lower measurement limit is 5×10
-10
mbar (gauge metal sealed).
To usefully cover the whole range of 5×10
-10
mbar … 10
-2
mbar, a low emission
current is used in the high pressure range (fine vacuum) and a high emission cur-
rent is used in the low pressure range (high vacuum). The switching of the emis-
sion current takes place at decreasing pressure at approx. 7.2×10
-6
mbar, at in-
creasing pressure at approx. 3.0×10 -5 mbar. At the switching threshold, the
BPG402-Sx can temporarily (<2 s) deviate from the specified accuracy.
Diagram of the Bayard-Alpert
measuring system
F1/F2 hot cathodes (filaments)
IC ion collector
EC anode (electron collector)
FS filament selector switch
IC
200V 40V
+ – + –
(Degas 2.5V) (Degas 250V)
EC
F 1
F 1
EC
IC
F 2
F 2
FS
Within certain limits, the thermal conductibility of gases is pressure dependent. This
physical phenomenon is used for pressure measurement in the thermal
conductivity vacuum meter according to Pirani. A self-adjusting bridge is used as
measuring circuit (
→ schematic). A thin tungsten wire forms the sensor element.
Wire resistance and thus temperature are kept constant through a suitable control
circuit. The electric power supplied to the wire is a measure for the thermal con-
ductance and thus the gas pressure. The basic principle of the self-adjusting bridge
circuit is shown in the following schematic:
4.1 Measuring Principle,
Measuring Behavior
Bayard-Alpert
Pirani