INFICON BPG402-Sx ATM to Ultra-High Vacuum Gauge User Manual

Page 4

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tina46e1-a (2010-03) BPG402.om

Contents

Product Identification

2

Validity

2

Intended Use

2

Functional Principle

3

1

Safety 6

1.1

Symbols Used

6

1.2

Personnel Qualifications

6

1.3

General Safety Instructions

7

1.4

Liability and Warranty

7

2

Technical Data

8

3

Installation 13

3.1

Vacuum Connection

13

3.1.1

Removing and Installing the Electronics Unit

14

3.1.2

Using the Optional Baffle

15

3.2

Electrical Connection

17

3.2.1

Use With INFICON VGC40x Vacuum Gauge Controller

17

3.2.2

Use With Other Controllers

17

3.2.2.1

Making an Individual Sensor Cable

18

3.2.2.2

Making a DeviceNet Interface Cable (BPG402-SD)

21

3.2.2.3

Making a Profibus Interface Cable (BPG402-SP)

22

3.2.3

Using the Optional Power Supply (With RS232C Line)

23

4

Operation 25

4.1

Measuring Principle, Measuring Behavior

25

4.2

Operational Principle of the Gauge

27

4.3

Putting the Gauge Into Operation

27

4.4

Degas 27

4.5

Filament Status

28

4.5.1

Filament Status Indicator

28

4.5.2

Filament Status Relay (Only BPG402-S)

28

4.5.3

Filament Status via Interface

28

4.6

Filament Control Mode

28

4.7

Emission Control Mode

29

4.8

Display (BPG402-S)

29

4.9

RS232C Interface

30

4.9.1

Description of the Functions

30

4.9.1.1

Output String (Transmit)

31

4.9.1.2

Input String (Receive)

33

4.10

DeviceNet Interface (BPG402-SD)

34

4.10.1

Description of the Functions

34

4.10.2

Operating Parameters

34

4.10.2.1

Operating Software

34

4.10.2.2

Node Address Setting

34

4.10.2.3

Data Rate Setting

35

4.10.3

Status Indicators

35

4.11

Profibus Interface (BPG402-SP)

36

4.11.1

Description of the Functions

36

4.11.2

Operating Parameters

36

4.11.2.1

Operating Software

36

4.11.2.2

Node Address Setting

36

4.12

Switching Functions

37

4.12.1

Setting the Switching Functions

38

5

Deinstallation 39

6

Maintenance, Repair

41

6.1

Cleaning the Gauge

41

6.2

Adjusting the Gauge

41

6.2.1

Adjustment at Atmospheric Pressure

41

6.2.2

Zero Point Adjustment

42

6.3

What to Do in Case of Problems

42

6.4

Replacing the Sensor

44

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