Appendix, A: relationship output signal – pressure – INFICON BPG402-Sx ATM to Ultra-High Vacuum Gauge User Manual
Page 47
tina46e1-a (2010-03) BPG402.om
47
Appendix
p = 10
(U - 7.75) / 0.75 + c
U = 0.75 × (log p - c) + 7.75
where U p c
[V]
[mbar]
0
[V]
[Pa]
2
[V]
[Torr]
-0.125
1E+01
1E–01
1E–03
1E–05
1E–07
1E–09
1E+03
0.0
1E+04
1E+02
1E+00
1E–02
1E–04
1E–06
1E–08
1E–10
1.0
2.0
3.0
4.0
5.0
6.0
7.0
8.0
9.0
10.0
se
ns
or
er
ro
r
Measuring signal U [V]
Pressure p [mbar]
inadm
issi
bl
e r
ange
inadm
issi
bl
e r
ange
Output signal U
[V]
[mbar]
Pressure p
[Torr]
[Pa]
0.1 / 0.3 / 0.5
Sensor error (
→ 42)
0.51 … 0.774
Inadmissible range
0.774 5Ч10
-10
3.75Ч10
-10
5Ч10
-8
1.00 1Ч10
-9
7.5Ч10
-10
1Ч10
-7
1.75 1Ч10
-8
7.5Ч10
-9
1Ч10
-6
2.5 1Ч10
-7
7.5Ч10
-8
1Ч10
-5
3.25 1Ч10
-6
7.5Ч10
-7
1Ч10
-4
4.00 1Ч10
-5
7.5Ч10
-6
1Ч10
-3
4.75 1Ч10
-4
7.5Ч10
-5
1Ч10
-2
5.50 1Ч10
-3
7.5Ч10
-4
1Ч10
-1
6.25 1Ч10
-2
7.5Ч10
-3
1Ч10
0
7.00 1Ч10
-1
7.5Ч10
-2
1Ч10
1
7.75 1Ч10
0
7.5Ч10
-1
1Ч10
2
8.50 1Ч10
1
7.5Ч10
0
1Ч10
3
9.25 1Ч10
2
7.5Ч10
1
1Ч10
4
10.00 1Ч10
3
7.5Ч10
2
1Ч10
5
>10.00 Inadmissible
range
A: Relationship
Output
Signal – Pressure
Conversion formulae
Conversion curve
Conversion table