1 optional serial command format, 2 additional option to serial command, Section 5.2.2.1 – INFICON STM-2 USB Thin Film Rate/Thickness Monitor User Manual
1 optional serial command format, 2 additional option to serial command, Section 5.2.2.1 | This | INFICON STM-2 USB Thin Film Rate/Thickness Monitor User Manual | Page 75 / 106