5 external communications (sqs-242 only), 6 computer requirements, 7 general specifications – INFICON SQM-242 Thin Film Deposition Controller Card Operating Manual User Manual

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SQM-242 Operating Manual

Power . . . . . . . . . . . . . . . . . . . . . . . . 0 to 100%

Slew Rate . . . . . . . . . . . . . . . . . . . . . 0 to 100%/s

P Term . . . . . . . . . . . . . . . . . . . . . . . 0 to 9999

I Term . . . . . . . . . . . . . . . . . . . . . . . . 0 to 99.9 s

D Term . . . . . . . . . . . . . . . . . . . . . . . 0 to 99.9 s

Rate . . . . . . . . . . . . . . . . . . . . . . . . . 0 to 999.9 s

Final Thickness . . . . . . . . . . . . . . . . 0 to 999.9 Å

Mode . . . . . . . . . . . . . . . . . . . . . . . . Normal or Simulate

Output Control . . . . . . . . . . . . . . . . . PID or Manual

Sensor/Output map . . . . . . . . . . . . . Any sensor can control any output

Analog/Output Map (SAM-242) . . . . Any analog input can control any output

Measurement Period . . . . . . . . . . . . 0.1 to 2 s

1.4.5 External Communications (SQS-242 only)

Serial Port. . . . . . . . . . . . . . . . . . . . . RS-232C

Baud Rates. . . . . . . . . . . . . . . . . 9,600; 19,200; 38,400;

Ethernet TCP/IP Port . . . . . . . . . . . . Static address, DHCP not supported.

1.4.6 Computer Requirements

Processor . . . . . . . . . . . . . . . . . . . . . 1 GHz Pentium IV or comparable

RAM . . . . . . . . . . . . . . . . . . . . . . . . . 256 MB RAM

Memory . . . . . . . . . . . . . . . . . . . . . . 30 MB hard disk space

Operating System. . . . . . . . . . . . . . . Windows 98/ ME/ NT/ 2000 SP4/ XP SP2/

7 32-Bit

Comm Port . . . . . . . . . . . . . . . . . . . . PCI Slot, Serial or USB for PLC I/O

communications (SQS-242 only)

1.4.7 General Specifications

SQM-242 Card Type . . . . . . . . . . . . PCI (32 bit, 5V, 33MHz)

SQM-242 Max. Cards/Computer . . . 6

SAM-242 Card Typer . . . . . . . . . . . . Slave to SQM-242 (ribbon cable)

SAM-242 Max. Cards/Computer . . . 1

Power Consumption . . . . . . . . . . . . . 5 W Max

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