INFICON SQM-242 Thin Film Deposition Controller Card Operating Manual - Manual (Page 45)

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SQM-242 Operating Manual
Map Sensors . . . . . . . . . . . . . . . . . . Assigns each sensor to an output. If a sensor
is assigned to Monitor, then it displays rate
and thickness, but does not contribute to the
control of any output to rate setpoint. If a
single sensor is assigned to an output, and
the output mode is set to PID, then that
sensor serves as the "measured rate" input
to the PID loop. If multiple sensors are
assigned to an output, then the average of all
assigned sensors is used as the "Measured
rate" input to the PID loop. If multiple sensors
are assigned to an output and a sensor fails,
it is automatically excluded from the average.
Material . . . . . . . . . . . . . . . . . . . . . . Sends the Density, Z-Ratio (Z-Factor), and
Tooling parameters to the selected sensor(s).
Manual/PID . . . . . . . . . . . . . . . . . . . Sets the output mode for the selected
output(s). In PID mode, output power is
controlled by the output Loop settings, to
achieve the desired Rate setpoint.
In Manual Power mode, output power is fixed
at the Power setting. To change the output
power in ManPwr mode, enter a new Power
value then click Set Power. Alternates Sends
the Density, Z-Ratio and Tooling parameters
to the selected sensor(s).
Loop. . . . . . . . . . . . . . . . . . . . . . . . . Sends the PID and rate setpoint parameters
to the SQM-242 card(s).
FullScale . . . . . . . . . . . . . . . . . . . . . Sends the Full Scale Volts, Maximum Power,
and Slew Rate parameters to the SQM-242
card(s).