INFICON SQM-242 Thin Film Deposition Controller Card Operating Manual User Manual

Page 74

Advertising
background image

7 - 20

IP

N 07

4-

54

9-

P1

A

SQM-242 Operating Manual

5

Connect the In-Vacuum Cable to the Sensor Head.

Verify there is continuity (<0.2 ohm) from the leaf spring contact in the
Sensor Head to the center pin on the un-terminated end of the In-Vacuum
cable.

Verify there is isolation (>10 megohm) between the leaf spring contact and
the In-Vacuum cable shield.

If the Sensor Head or the In-Vacuum cable system is found to be defective, look for
defective contacts at the In-Vacuum cable to Sensor Head connection, repair or
replace the Sensor Head as necessary. Re-attach the In-Vacuum cable to the
Feed-Through and repeat this procedure starting at step 2.

6

Ensure that the leaf springs in the Sensor Head and those in the ceramic
retainer are bent to an angle of approximately 60 degrees and 45 degrees from
flat, respectively.

7.3.1.4 System Diagnostics Pass But

Crystal Fail Message Remains

If the system is operating properly yet the Crystal Fail message is still displayed,
perform the following tasks.

1

On the Ceramic Retainer verify that the center rivet is secure. Repair or replace
the ceramic retainer as necessary.

2

Inspect the inside of the Crystal Holder for build-up of material. Clean or replace
the Crystal Holder as necessary.

After verifying the Sensor Head contacts, the Sensor Head/In-Vacuum cable
connection and the ceramic retainer contacts, re-assemble the system. If the
Crystal Fail message remains, replace the monitor crystal with a new monitor
crystal. Verify that the monitor crystal works properly by inserting it into a known
good measurement system. If you continue to experience problems, contact
INFICON.

Advertising