3 bakeable sensor – INFICON SQM-242 Thin Film Deposition Controller Card Operating Manual User Manual
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SQM-242 Operating Manual
7.2.3 Bakeable Sensor
For the Bakeable sensor, the procedure is the same as the Front Load sensor
except that you must first unlock the cam assembly by flipping it up. Once the
crystal has been replaced, place a flat edge of the holder flush with the cam
mechanism and lock it in place with the cam. See
.
Figure 7-4 Bakeable Crystal Sensor
Crystal Holder and
Retainer Spring
IPN 750-218-G1
Crystal IPN 008-010-G10
Fully Coated Face (Gold)
Crystal Retainer IPN 007-064
Clamping Spring IPN 007-094
Contact IPN 007-099
Insulator IPN 007-103
Spreader Bar
IPN 007-267-P2
Shoulder Washer
IPN 007-268-P1
Two Required
Shoulder Washer
IPN 007-269-P1
Cam Mechanism
IPN 007-095
Cover IPN 007-101
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