INFICON SQM-242 Thin Film Deposition Controller Card Operating Manual - Manual (Page 39)

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SQM-242 Operating Manual
Frequency . . . . . . . . . . . . . . . . . . . . The frequency values for the quartz crystal
sensors used as inputs to the SQM-242.
Sensor readings outside the Max/Min values
cause a crystal fail error. Values 1 MHz to
10 MHz are permitted, but 6 MHz crystals are
most common.
Min/Max values are also used to calculate
the % Life remaining on the sensor dialog
box. For 6 MHz crystals, set the Max value to
the highest possible new crystal frequency
(typically 6.1 MHz). Set the Initial frequency
to the nominal new crystal frequency
(6 MHz). Set Min Frequency to the lowest
useable crystal frequency (typically 5 MHz).
Keep in mind that some materials cause
premature crystal failure.
Period . . . . . . . . . . . . . . . . . . . . . . . Sets the measurement period between
0.2 seconds (5 readings per second) and
2 seconds. A longer period gives higher
reading accuracy, especially in low rate
applications.
Filter. . . . . . . . . . . . . . . . . . . . . . . . . Sets the number of readings used in the
reading filter. A low setting gives rapid
response to process changes, high settings
give smoother readings.
Log to File . . . . . . . . . . . . . . . . . . . . Enables data logging to disk. Enter a
filename without path to save data in the
application directory. Enter a full path to save
data in another directory. Data is saved in
comma delimited format easily imported
import into any spreadsheet.